Pfeiffer Vacuum TMH 521 P Operating Instructions Manual Download Page 28 | Manualshive

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28

Pos. Description

Pieces Size

Number

Comments

Ordering

Quantity

Spare Parts TMH 521 P/TMU 521 P

6

Blanking plug

4

P 4098 582 FA

8

Electronic Device Unit

1

PM C01 720

please see Sec. 7.2.

8d

Remote plug

1

PM 051 793 -X

17

USIT ring

1

P 3529 133 -A

91

O-ring

1

38x3

P 4070 621 PV

92

Lubricant reservoir

1

PM 063 265-T

10. Spare Parts

Spare parts

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Summary of Contents for TMH 521 P

Page 1: ...Turbomolecular Drag Pumps With Electronic Drive Unit TC 600 PM 0496 BE K 0503 TMH 521 P TMU 521 P Betriebsanleitung Operating Instructions...

Page 2: ...nnections Diagram 14 4 Operations 15 4 1 Before Switching ON 15 4 2 Switching ON 15 4 3 Switching OFF And Venting 15 4 4 Gas Type Dependent Operations 16 4 5 Shutting Down For Longer Periods 16 4 6 Op...

Page 3: ...p Take care to avoid burns Keep leads and cables well away from hot surfaces 70 C Operate the turbopump with TC 600 only in conjunction with the relevant power supply accessory Without the cover plate...

Page 4: ...on altitude 2000 m max Pollution degree 2 Overvoltage category II Connection voltage 72 VDC 5 Proper Use The Turbomolecular Pumps TMH 521 P TMU 521 P may only be used for the purpose of generating vac...

Page 5: ...olving too high levels of heat radiation power see Section 9 Technical Data Venting with rates higher than in Section 4 3 stated Operating the pump without the cover plate for the TC 600 in environmen...

Page 6: ...r water cooling is necessary The person responsible for commissioning must ensure that the installation is carried out in accordance with the legal regulations and the pertinent industrial standards P...

Page 7: ...ing coated PM 016 212 AU with protective mesher Bracket screws PF 300 110 T 1 16 6 pieces must be used DN 160 ISO K Centering ring coated PM 016 216 AU DN 160 ISO K Centering ring coated PM 016 217 AU...

Page 8: ...ance hole A ISO F flange B Stud screw with two nuts C Centering ring coated D Splinter shield E Protective mesh 1 DN 100 ISO F with washer For a flange material having a strength of 170 270 N mm2 and...

Page 9: ...re vacuum flange must always point downwards CAUTION Permissible installation positions for the turbopump 11 Vacuum chamber 20 20 Installation position with oil sealed backing pump 11 Vacuum chamber 1...

Page 10: ...n is dependent on the degree of dirt and on the required final pressure level The heating duration should be at least 4 hours Where casing heating is involved the turbopump must be water cooled High t...

Page 11: ...8b Secure plug X4 on the TC 600 with a screw and tooth lock 8c 1 Connect plug X2 on connecting cable 8a with Power Supply TPS 300 DCU 300 Accessories on connection X2 Using screws and tooth lock 8c i...

Page 12: ...tained optional sealing gas valve off1 optional sealing gas valve on1 5 reset by supplying a pulse T 2s with an amplitude of 24V a malfunction acknowledgement can be processed 6 standby off standby on...

Page 13: ...50 PLEASENOTE WARNING Designation Value Serial interface type RS 485 Baud rate 9600 Baud Data file word length 8 bit Parity no parity Start bits 1 Stop bits 1 2 The electrical connections in the TC 60...

Page 14: ...box Heating Mains input heating 115 208 230 VAC Mains input pumping station 115 208 230 VAC Connection pumping station Relay box Pumping station Imax 16A HEATING VENTING VALVE TVF 005 L N PE PE N L L...

Page 15: ...n TC 600 F1 Fuse F2 Fuse F1 F2 S1 X1 X2 4 2 Switching ON Switch on the turbopump with switch S1 on the power supply With air cooling the cooling fan is also switched on via Electronic Drive Unit TC 60...

Page 16: ...ssible power and gas friction is attained The power limitation serves to protect the pump against ther mal over loading In order to avoid rotation speed fluctuations it is recommended to set in rotati...

Page 17: ...nds the turbopump is set in operation During operations the turbopump can be switched on and off while the pumping station is switched on Thereby the turbopump will not be vented Pumping Station Any c...

Page 18: ...of the nominal rotation speed It can be used for example for a message pump ready to operate Switching output 2 Active low with a malfunction collective malfunction message The connection of a relay...

Page 19: ...rotation speed switchpoint and results in the turbomolecular pump being switched off LED on the TC 600 glows red Collective malfunction LED Cause green red Glows power supply OK Function pumping stat...

Page 20: ...flow Insufficient air supply Ensure adequate air supply Fore vacuum pressure too high Reduce fore vacuum pressure Ambient temperature too high Reduce ambient temperature Pump doesn t attain final pres...

Page 21: ...xtreme load conditions or impure processes discuss the replacement interval with Pfeiffer Vacuum Service Turn off turbopump vent to atmospheric pressure and allow to cool if necessary If necessary rem...

Page 22: ...ecessary remove the turbopump from the system Unsrew screws 8c 2 pieces from the Electronic Drive Unit TC 600 and remove the TC 600 from the turbopump CAUTION Install the new Electronic Drive Unit TC...

Page 23: ...We will carry out the decontamination and invoice this work to you if you have not attached this note This also applies where the operator does not have the facilities to carry out the decontaminatio...

Page 24: ...r W 14 14 Volum flow rate for Nitrogen N2 l s 290 510 290 510 Helium He l s 400 520 400 520 Hydrogen H2 l s 380 450 380 450 Argon Ar l s 260 500 260 500 Compression ration for N2 1012 1012 He 5 107 5...

Page 25: ...9 166 184 123 53 5 99 5 120 224 242 DN 160 ISO K DN 100 ISO K DN 160 CF F DN 100 CF F 97 1 147 5 158 2xM8 58 100 148 5 95 86 5 144 120 3 0 85 4xM8 67 4 5 4 0 170 208 160 DN 25 ISO KF TMH 521 P TMU 521...

Page 26: ...26 119 242 218 210 183 9 139 126 208 4 0 95 100 120 58 M8 M8 67 88 7 4 5 122 7 160 30 8 5 0 1 DN 25 ISO KF G 1 4 DN 100 ISO F TMH 521 P DN 100 ISO F...

Page 27: ...27 4 0 95 100 208 110 3 121 165 9 224 192 120 101 200 58 M8 M8 67 88 7 4 5 122 7 160 30 8 5 0 1 DN 25 ISO KF G 1 4 DN 160 ISO F TMH 521 P DN 160 ISO F...

Page 28: ...Parts TMH 521 P TMU 521 P 6 Blanking plug 4 P 4098 582 FA 8 Electronic Device Unit 1 PM C01 720 please see Sec 7 2 8d Remote plug 1 PM 051 793 X 17 USIT ring 1 P 3529 133 A 91 O ring 1 38x3 P 4070 62...

Page 29: ...CU 300 19 insert unit with Display and Operating Unit DCU 300 PM C01 696 PM 0477 BN Mains cable Schuko plug 230 V P 4564 309 ZA UL plug 208 V P 4564 309 ZF UL plug 115 V P 4564 309 ZE Display and Oper...

Page 30: ...repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to accept...

Page 31: ...hereby certify that the product specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the end product is...

Page 32: ...49 0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Vacuum is nothing but everything to us Turbo Pumps Rotary Vane Vacuum Pumps Roots Pumps Dry Vacuum Pumps Leak Test Units Valves Fl...

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