24
9. Technical Data
1) Distance from the pump 1 m
2) Measured at a helium concentration of 100 %, 10 s measurement time
3) Measured with a rotary vane pump 1.5 m3/h; higher throughputs with reduced rotation speed.
4) Rotation speed of pump may drop below the nominal rotation speed.
5) For gas characteristics line please refer to Section 4.4.
6) In accordance with German Industrial Standard 28428 the final pressure which is attained in a
measuring dome 48 hours after baking out.
7) Please see type plate.
8) At maximum gas throughput
9) Protection class IP 54 is afforded for the Electronic Drive Unit TC 600
by refro-fitting a cover plate (please refer to Section 11. Accessories).
Feature
Unit
TMH 521 P
TMU 521 P
Connection nominal diameter
Inlet
DN 100 ISO-K
DN 160 ISO-K
DN 100 CF-F
DN 160 CF-F
DN 100 ISO-F
DN 160 ISO-F
Outlet
DN 25 ISO-KF/G 1/4“
DN 25 ISO-KF/G 1/4“
Venting connection
G 1/8”
G 1/8”
Nominal rotation speed
Hz (1/min)
833 (50 000)
833 (50 000)
Standby rotation speed
Hz (1/min)
550 (33 000)
550 (33 000)
Start-up time
min
5,5
5,5
Maximum noise level1)
dB (A)
50
50
Final pressure, backing pump
mbar
< 5
< 5
Integral leak rate (He)2)
mbar l/s
< 1 · 10
-7
< 1 · 10
-7
Maximum permissible rotor temperature
°C
90
90
Permissible heat radiaten power
W
14
14
Volum flow rate for:
Nitrogen N2
l/s
290
510
290
510
Helium He
l/s
400
520
400
520
Hydrogen H2
l/s
380
450
380
450
Argon Ar
l/s
260
500
260
500
Compression ration for:
N2
> 1012
> 1012
He
5 · 10
7
5 · 10
7
H2
6,5 · 10
5
6,5 · 10
5
Ar
> 1012
> 1012
Maximum fore-vacuum pressure
N2
mbar
13,0
13,0
He
mbar
12,5
12,5
H2
mbar
9,0
9,0
Ar
mbar
11,0
11,0
Maximum gas throughput3) with water cooling
N2
mbar l/s
4,0
4,0
He
mbar l/s
8,0
8,0
H2
mbar l/s
9,5
9,5
Ar
mbar l/s
2,0
2,0
Maximum gas throughput at
intake pressure of 0.1 mbar4)
N2
mbar l/s
12,0
12,0
He
mbar l/s
12,0
12,0
H2
mbar l/s
8,0
8,0
Ar
mbar l/s
12,0
12,0
Vertex power characteristics line5)
A
W / Hz
185/833
185/833
B
W / Hz
260/485
260/485
C
W / Hz
160/833
160/833
D
W / Hz
260/435
260/435
Final pressure6)
with rotary vane pumps
mbar
< 1 · 10-7
< 5 · 10-10
with diaphragm pumps
mbar
< 1 · 10-7
< 1 · 10-8
Lubricant
TL 011
TL 011
Cooling water consumption
with water at 15 °C7)
l/h
100
100
Cooling water temperature
°C
5 - 25
5 - 25
Permissible ambient temperature
with air cooling
°C
0 - 35
0 - 35
Heating power consumption
W
100
100
Weight
kg
14,5 (ISO-K)/
13,5 (ISO-K)/
15,0
14,5
kg
15,0 (ISO-F)
14,2 (ISO-F)
Permissible magnetic field
mT
5,0
5,0
Operating voltage
VDC
72 ±5%
72 ±5%
Duration8)- / max. current consumption
A
3,2/4,2
3,2/4,2
Duration8)- / max. power
W
230/300
230/300
Protection class9)
IP 30
IP 30
Shipping and storage temperature
°C
-25 to +55
-25 to +55
Relative humidity
%
5-85 non condensing
5-85 non condensing
