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Danger of damage to the pump or system.

Danger of burns from touching hot parts.

Danger of an electric shock.

1. Safety Precautions 

Read and follow all the instructions in this manual.

Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can arise in your system;
– Hazards which can be caused by the medium being 

pumped.

Avoid exposing any part of your body to vacuum.

Comply with all safety and accident prevention
regulations.

Check regularly that all safety requirements are being
complied with.

Do not operate the pump with open high vacuum flange.

Do not carry out any unauthorised conversions or modifi-
cations on the pump.

When returning the pump to us please note the shipping
instructions.

Use at least four bracket screws to connect the high vacu-
um flange.

Fix down the pump in accordance with the instructions on
installation.

Do not disconnect the pump cable during operations.

When the pump is open, disconnect the electronic drive
unit from the mains.

After switching off the pump, disconnect the electronic
drive unit only once the rotor is at rest.

When working on the pump, only open the high vacuum
flange once the rotor is at rest.

When using sealing gas, limit the pressure in the hose
connection to 2 bar via the overflow valve.

When using sealing gas, the pressure in the hose connec-
tion should be limited to 2 bar via the overpressure valve.

If a heater is in use temperatures of up to 120 °C can be

present in the area of the high vacuum flange. Take care to
avoid burns !

During operations, temperatures of up to 65 °C can arise in
the lower part of the turbopump. Take care to avoid burns!

Keep leads and cables well away from hot 
surfaces ( > 70 °C).

Modifications reserved.

Danger of injury from moving parts.

Danger of personal injury.

1.1. For Your Orientation

In the text

Operating instruction:  Here, you have to do something.

Symbols used

The following symbols are used throughout in the
illustrations:

High vacuum flange

Fore-vacuum flange

Venting connection

Cooling water connection

Sealing gas connection

Power connection

Position numbers

Identical pump and accessory parts have the same position
numbers in all illustrations. 

1.2. Pictogram Definitions

Summary of Contents for TMH 260 C

Page 1: ...Operating Instructions Turbomolecular Drag Pumps For Corrosive Gas Processes TMH 260 C TMU 260 C TMH 520 C TMU 520 C PM 800 370 BE D 9906 TMH U 260 C TMH U 520 C...

Page 2: ...y 7 3 5 Connecting The Venting Valves 7 3 6 Connecting The Electronic Drive Unit 8 3 7 Connecting The Sealing Gas Valve 8 4 Operations 9 4 1 Lubricant Filling 9 4 2 Before Switching ON 9 4 3 Switching...

Page 3: ...witching off the pump disconnect the electronic drive unit only once the rotor is at rest When working on the pump only open the high vacuum flange once the rotor is at rest When using sealing gas lim...

Page 4: ...of heat radiation power see Section 8 Technical Data Using accessories not named in this manual and or not authorised by PFEIFFER Improper use will cause any rights regarding liability and guarantees...

Page 5: ...these must be taken up by the turbopump and frame Pumps must be anchored as follows ISO flange with 4 bracket screws or CF flange with the complete set of M8 screws or underside of the pump with 4 scr...

Page 6: ...l faces outwards Bend clamping lugs slightly outwards so that the splinter shield will sit firmly in the high vacuum flange preventing noise Insert splinter shield in the high vacuum flange with clam...

Page 7: ...ter connections Fit Cooling Water Monitor TCW 002 accessory in return line Connect return line to the other turbo pump cooling water connection Thighten the hollow screws on the cooling water connec t...

Page 8: ...rbo pump and lubricant pump For details please see the operating instructions for the electronic drive unit 3 7 Connecting The Sealing Gas Valve To protect turbo pump particulary where corrosive or du...

Page 9: ...eating Only Pumps With Heating Jackets Heating turbo pumps and vacuum chambers accelerates the attainment of final pressures The heating period is dependent on the level of contamination and the requi...

Page 10: ...pump and backing pump at the same time with switch S1 Open locking screw or venting valve in venting connection With PFEIFFER venting valves and respective control units venting proceeds automatically...

Page 11: ...CP too short Thermal overloading caused by Insufficient water flow Ensure free flow Insufficient air supply Ensure adequate air supply Fore vacuum pressure too high Reduce fore vacuum pressure Ambient...

Page 12: ...a matter of principle Fill out the contamination declaration In every case the Contamination Declaration must be completed diligently and truthfully A copy of the completed declaration must accompany...

Page 13: ...ice can advise regarding intervals Switch off turbopump vent to atmosphere see Section 4 5 and allow to cool down as necessary Remove turbopump from the system if necessary Unscrew lubricant drain scr...

Page 14: ...ove float 79 press out pin 80 When re fitting the head of the float must point to the pin Check free movement of the two radial ball bearings 78 Carry out bearing change if the bearing is defective cl...

Page 15: ...l s 170 300 500 Helium He l s 170 400 500 Hydrogen H2 l s 150 400 480 Compression ratio for N2 1 109 1012 He 3 105 5 107 H2 1 3 104 5 106 Max fore vacuum pressure N2 mbar 10 16 He mbar 8 14 H2 mbar 4...

Page 16: ...16 8 1 Dimensions TMH TMU 260 C TMH TMU 520 C A Locking screw A Locking screw...

Page 17: ...ety Valvel TVV 001 DN 16 ISO KF PM Z01 205 PM 800 263 BN Sealing gas valve DN 10 ISO KF PM Z01 142 PM 800 229 BN Hose nipple for sealing gas valve DN 16 ISO KF 10 PF 144 020 Syringe 50 ml PM 006 915 U...

Page 18: ...cant drain screw 1 A2 50 G1 8 A N 3191 382 X 73 Sight glass 1 PM 003 251 74 O ring 2 Vi 36 x 2 P 4070 594 PV 75 O ring 2 Vi 6 x 2 2 P 4070 088 PV 76 O ring 1 Vi 22x3 P 4070 384 PV 77 Lubricant pump 1...

Page 19: ...19 Spare parts...

Page 20: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 21: ...che la sua messa in funzione vietata sin quando non stato accertato che il prodotto finale non rispetta le disposizioni della direttiva UE 89 392 CEE Appendice II B Attestiamo la conformit con la dir...

Page 22: ...mesma antes de se ter declarado que o produto final est em conformidade com o disposto na Directiva CE na redac o 89 392 CEE Ap ndice II B Certificamos haver conformidade com o disposto na Directiva...

Page 23: ...59 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephon 1 603 578 6500 telefax 1 603 578 6550 Venezuela Secotec S A Apartado 3452 Caracas 1010 A telephone 58 2 573 8687...

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