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Zentrale/Headquarters

Pfeiffer Vacuum GmbH

Emmeliusstrasse 33
D-35614 Asslar

Telefon 06441/802-0

Telefax 06441/802-202

Hotline 06441/802-333

Internet: 

http://www.pfeiffer-vacuum.de

India

Pfeiffer Vacuum India Ltd.
25-E Nicholson Road, Tarbund
Secunderabad 500 009, 
tel91 / 40 775 0014, t91 / 40 775 7774

Israel

Eastronics Ltd., 11 Rozanis Street, P.O. Box 39 300,
Tel Aviv 61392,
tel972 / 3 6458 777,
t972 / 3 6458 666

Italy

Pfeiffer Vacuum Italia S.p.a.
Via San Martino, 44  I-20017 RHO (Milano)
tel39 / 2 93 99 051, t39 / 2 93 99 05 33

Japan

Hakuto Co. Ltd., C.P.O. Box 25,
Vacuum & Scientific Instruments Division
Tokyo Central 100-91,
tel81 / 3 32 258 910
t81 / 3 32 259 009

Korea

Pfeiffer Vacuum Korea Ltd., 3F Haein Building 453,
Dokok-Dong, Kang Nam-Ku, Seoul, 135-270
tel82 / 2 3461 0671/5
t82 / 2 3461 0676

Netherlands

Pfeiffer Vacuum Nederland BV
Veldzigt 30a, NL-3454 PW De Meern,
tel31 / 30 6666050, t31 / 30 6662794

Peru

Ing. E. Brammertz S.C.R.L., José Pardo 182,
Apartado 173, PE-18 Miraflores,
tel51 / 1 445 8178
t51 / 1 445-1931

Poland

Softrade Sp.z.o.o, ul. Malwowa 35,
PL-60-175 Poznan, tel48 / 61 8677 168,
t48 / 61 8677 111

Portugal

Unilaser Lda, Taguspark
Núcleo Central, sala n

o

268, Estrada Cacém-

Porto Salvo, P-2780 Oeiras
tel351 / 1 421 7733
t351 / 1 421 7744

Singapore

APP Systems Services Pte. Ltd, 2 Corporation Road
06-14 Corporation Place, Singapore 618494,
tel65 / 268 2024, t65 / 268 6621

Spain

Tecnovac
Tecnologia de Vacio S.L., Ronda de Poniente, 6 Bajo F
Centro Empresarial Euronova
E-28760 Tres Cantos (Madrid)
tel34 / 91 804 11 34,
t34 / 91 804 30 91

Sweden

Pfeiffer Vacuum Scandinavia AB
Magasinsgatan 35, Box 10412
S-43424 Kungsbacka
tel46 / 300 710 80
t46 / 300 172 85
Service Hotline: +46 / 300 710 85

Switzerland

Pfeiffer Vacuum Schweiz S.A.
Förrlibuckstraße 30, CH-8005 Zürich
tel41 / 1 444 2255,
t41 / 1 444 2266

South Africa

Labotec Pty Ltd., P.O. Box 6553,
Halfway House
1685 Midrand
tel27 / 11 315 5434
t27 / 11 315 5882

Taiwan

S & T Hitech Ltd. Hsinchu office
No. 103, Hsien Chen 11th Street, Jubei City,
HsinChu County, Taiwan, R.O.C.
(zip/postal code: 302)
tel886 / 3 554 1020 
t886 / 3 554 0867

Thailand

S & T Enterprises (Thailand) Ltd.
18th Floor, Chokchail Intíl Bldg.
690 Sukhumvit Road
Klongton, Klongtoey
Bangkok 10110 
tel662 / 259 4623 
t662 / 259 6243

U.S.A.

Pfeiffer Vacuum, Inc.
24 Trafalgar Square
Nashua, NH 03063-1988
USA
te1/ 603 578 6500
t1/ 603 578 6550

Venezuela

Secotec S.A., Apartado 3452, Caracas 1010-A,
tel58 / 2 573 8687
t58 / 2 573 1932

Other countries

AVI - Applied Vaccuum Industries GmbH
Leginglenstrasse 17A; CH-7320 Sargans
Switzerland
te41 / 81 710 03 80
t41 / 81 710 03 81

Scope of represented countries

Armenia, Azerbaijan, Bangladesh, Belarus, Bulgaria,
Cambodia, Estonia, Georgia, Hong Kong, Kazakhstan,
Kingdom of Nepal, Kirghizia, Latvia, Lithuania, Maldavia,
Philippines, P.R. China, Rumania, Russia, Tajikistan,
Turkmenistan, Ukraine, Uzbekistan, Vietnam

A.E.M.S.
Advanced Equipment Materials and Systems
P.O. Box 25
Föhrenweg 18
FL-9496 Balzers
te41 / 75 380 0550
t41 / 75 380 0551

Scope of represented countries

Bahrain, Egypt, Iraq, Iran, Jordan, Kuwait, Lebanon,
Lybia, Oman, Pakistan, Saudi-Arabia, Sudan, Syria,
Turkey, United Arab Emirates, Yemen

Argentina

ARO S.A., Casilla de Correo 4890,
1000 Buenos Aires, tel54 / 1 331 3918,
t54 / 1 331 3572

Australia

Balzers Australia Pty. Ltd., Level 1,
3, Northcliff Street, Milsons Point, NSW 2061,
tel61 / 2 9954 1925, t61 / 2 9954 1939

Austria

Pfeiffer Vacuum Austria GmbH
Diefenbachgasse 35, A-1150 Wien,
tel43 / 1 8941 704, t43 / 1 8941 707
Service Hotline: +43 / 1 8941704

Belgium / Luxemburg

Pfeiffer Vacuum Belgium N.V./S.A.
Minervastraat 14, B-1930 Zaventem
tel32 / 2 725 0525, t32 / 2 725 0873
Service Hotline: +32 / 2 725 3545

Brazil

Elmi Tec
Assistencia Técnica e Representação S/C Ltda.
Rua Bernadino de Compos, 551
CEP 04620-002 São Paulo, SP - Brasil
tel55 / 11 532 0740
t55 / 11 535 3598

Chile

BERMAT S.A., Coyancura 2283, piso 6 
Providencia, P.O. Box 9781, Santiago
tel56 / 2 231 8877,
t56 / 2 231 4294

Colombia

Arotec Colombiana S.A., Carrera 15 No.38-17
P.O. Box 050 862, Santafe de Bogota  /  D.C.
tel57 / 1 288 7799, t57 / 1 285 3604

Denmark

Pfeiffer Vacuum Scandinavia AB, Vesterengen 2,
DK-2630 Taastrup, 
tel45 / 43 52 38 00
t45 / 43 52 38 50

France

Pfeiffer Vacuum France SAS
45, rue Senouque, BP 139   F-78531 BUC Cedex
tel33 / (0)1 30 83 04 00
t33 / (0)1 30 83 04 04

Germany

Pfeiffer Vacuum Vertriebs GmbH,
Emmeliusstrasse 33, D-35614 Asslar
tel49 / 6441 802 400
t49 / 6441 802 399
Service Hotline: +49 / 6441 802 333

Great Britain

Pfeiffer Vacuum Ltd.
Bradbourne Drive, Tilbrook,
Milton Keynes, MK7 8AZ, United Kingdom
tel44 / 1 908 373 333
t44 / 1 908 377 776

Greece

Analytical Instruments S.A., 1 Mantzarou St.,
GR-15451 Athens, 
tel30 / 1 674 8973
t30 / 1 674 8978

(0499)

Summary of Contents for TMH 260 C

Page 1: ...Operating Instructions Turbomolecular Drag Pumps For Corrosive Gas Processes TMH 260 C TMU 260 C TMH 520 C TMU 520 C PM 800 370 BE D 9906 TMH U 260 C TMH U 520 C...

Page 2: ...y 7 3 5 Connecting The Venting Valves 7 3 6 Connecting The Electronic Drive Unit 8 3 7 Connecting The Sealing Gas Valve 8 4 Operations 9 4 1 Lubricant Filling 9 4 2 Before Switching ON 9 4 3 Switching...

Page 3: ...witching off the pump disconnect the electronic drive unit only once the rotor is at rest When working on the pump only open the high vacuum flange once the rotor is at rest When using sealing gas lim...

Page 4: ...of heat radiation power see Section 8 Technical Data Using accessories not named in this manual and or not authorised by PFEIFFER Improper use will cause any rights regarding liability and guarantees...

Page 5: ...these must be taken up by the turbopump and frame Pumps must be anchored as follows ISO flange with 4 bracket screws or CF flange with the complete set of M8 screws or underside of the pump with 4 scr...

Page 6: ...l faces outwards Bend clamping lugs slightly outwards so that the splinter shield will sit firmly in the high vacuum flange preventing noise Insert splinter shield in the high vacuum flange with clam...

Page 7: ...ter connections Fit Cooling Water Monitor TCW 002 accessory in return line Connect return line to the other turbo pump cooling water connection Thighten the hollow screws on the cooling water connec t...

Page 8: ...rbo pump and lubricant pump For details please see the operating instructions for the electronic drive unit 3 7 Connecting The Sealing Gas Valve To protect turbo pump particulary where corrosive or du...

Page 9: ...eating Only Pumps With Heating Jackets Heating turbo pumps and vacuum chambers accelerates the attainment of final pressures The heating period is dependent on the level of contamination and the requi...

Page 10: ...pump and backing pump at the same time with switch S1 Open locking screw or venting valve in venting connection With PFEIFFER venting valves and respective control units venting proceeds automatically...

Page 11: ...CP too short Thermal overloading caused by Insufficient water flow Ensure free flow Insufficient air supply Ensure adequate air supply Fore vacuum pressure too high Reduce fore vacuum pressure Ambient...

Page 12: ...a matter of principle Fill out the contamination declaration In every case the Contamination Declaration must be completed diligently and truthfully A copy of the completed declaration must accompany...

Page 13: ...ice can advise regarding intervals Switch off turbopump vent to atmosphere see Section 4 5 and allow to cool down as necessary Remove turbopump from the system if necessary Unscrew lubricant drain scr...

Page 14: ...ove float 79 press out pin 80 When re fitting the head of the float must point to the pin Check free movement of the two radial ball bearings 78 Carry out bearing change if the bearing is defective cl...

Page 15: ...l s 170 300 500 Helium He l s 170 400 500 Hydrogen H2 l s 150 400 480 Compression ratio for N2 1 109 1012 He 3 105 5 107 H2 1 3 104 5 106 Max fore vacuum pressure N2 mbar 10 16 He mbar 8 14 H2 mbar 4...

Page 16: ...16 8 1 Dimensions TMH TMU 260 C TMH TMU 520 C A Locking screw A Locking screw...

Page 17: ...ety Valvel TVV 001 DN 16 ISO KF PM Z01 205 PM 800 263 BN Sealing gas valve DN 10 ISO KF PM Z01 142 PM 800 229 BN Hose nipple for sealing gas valve DN 16 ISO KF 10 PF 144 020 Syringe 50 ml PM 006 915 U...

Page 18: ...cant drain screw 1 A2 50 G1 8 A N 3191 382 X 73 Sight glass 1 PM 003 251 74 O ring 2 Vi 36 x 2 P 4070 594 PV 75 O ring 2 Vi 6 x 2 2 P 4070 088 PV 76 O ring 1 Vi 22x3 P 4070 384 PV 77 Lubricant pump 1...

Page 19: ...19 Spare parts...

Page 20: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 21: ...che la sua messa in funzione vietata sin quando non stato accertato che il prodotto finale non rispetta le disposizioni della direttiva UE 89 392 CEE Appendice II B Attestiamo la conformit con la dir...

Page 22: ...mesma antes de se ter declarado que o produto final est em conformidade com o disposto na Directiva CE na redac o 89 392 CEE Ap ndice II B Certificamos haver conformidade com o disposto na Directiva...

Page 23: ...59 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephon 1 603 578 6500 telefax 1 603 578 6550 Venezuela Secotec S A Apartado 3452 Caracas 1010 A telephone 58 2 573 8687...

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