4
2.1. Main Features
2. Understanding The Pumps
Proper use
– Turbomolecular Pumps may only be used for the purpose
of generating vacuum.
– The Turbomolecular Pumps are designed to pump corrosi-
ve gases and vapours. Where corrosive gas processes
are involved, gas bonding and particels which can dama-
ge the surfaces of the pump can be produced. The motor
and bearing compartments have to be protected with sea-
ling gas.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
– Turbomolecular Pumps may only be operated with a
PFEIFFER Electronic Drive Units and relevant cables.
– The turbo pump must be connected to a backing pump as
per Section 3.3.
Improper use
Certain types of use are regarded as improper, e.g.
– Pumping explosive gases.
– Operating the pump where explosive processes are
involved.
– The pumping of gases and vapours which attack the mate-
rials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with impermissibly high fore-vacuum pressure.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 8. ”Technical Data”).
– Using accessories not named in this manual and/or not
authorised by PFEIFFER.
Improper use will cause any rights regarding liability and
guarantees to be forfeited.
2.2. Differences Between The Pump Types
Feature
TMH 260 C
TMU 260 C
HV flange
ISO-K
CF-F
Seal
Viton
Metal
Attainable
< 1 · 10-8 mbar
< 1 · 10-9 mbar
final pressure
(
without baking out
)
(
with baking out
)
TMH 520 C
TMU 520 C
HV flange
ISO-K
CF-F
Seal
Viton
Metal
Attainable
r
< 1 · 10-8 mbar
< 5 · 10-11 mbar
final pressure
(
without baking out
)
(
with baking out
)
All parts exposed to the media are either manufactured in, or
coated with, corrosion-proof materials.
Sealing gas can be connected to protect rotor bearing and
lubricant (see Section 3.7.).
Cooling
Standard:
Water cooling
Integrated excess temperature safety feature:
Electronic drive unit reduces
rotor rotation speed to zero.
Bearings
High vacuum side: Wear free, coated permanent magnetic
bearing.
Fore-vacuum side: Oil circulatory lubricated bearings with
ceramic balls
Pumps must
not
be transported when
containing lubricant.
When being fitted into or dosmantled from a
system, turbopumps may only be positioned as
shown in Section 3.2.
Other positions can cause the pumps to be contaminated with
lubricant.
Turbomolecular Pumps TMH/U 260 C
1
High vacuum flange
2
Fore-vacuum flange
3
Cooling water connection
4
Venting connection
5
Power connection
6
Rubber feet
9
Locking screw/sealing gas connection
52 Connecting cable/Lubricant monitor
71 Lubricant filler screw
72 Lubricant drain screw
77 Lubricant pump
1
3
77
52
72
71
2
4
5
9
6
