6.1
6.2
6.2.1 Operation without operating unit
6.2.2 Operation via multi-function connection "X3"
6.2.3 Operation via Pfeiffer Vacuum display and control unit
6.3
6.4
6.4.1 Operating mode display via LED
6.4.2 Temperature monitoring
6.5
6.5.1 Switching off
6.5.2 Venting
7
7.1
General maintenance information
7.2
Checklist for inspection and maintenance
7.3
Replace operating fluid reservoir
7.3.1 Remove operating fluid reservoir
7.3.2 Assemble operating fluid reservoir
7.4
7.5
Confirming speed specification
8
8.1
Shutting down for longer periods
8.2
9
9.1
9.2
10
11
Service solutions by Pfeiffer Vacuum
12
13
13.2 Ordering accessories
14
14.1 General
14.2 Technical data
14.3 Substances in contact with the media
14.4 Dimensions
Table of contents
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