► Pay attention to when the operating fluid must be changed.
► For any questions relating to maintenance, contact the appropriate Pfeiffer Vacuum Service loca-
tion.
Action
Inspection Mainte-
nance lev-
el 1
Mainte-
nance lev-
el 2
Mainte-
nance lev-
el 3
Required ma-
terial
Described in document
OI
OI/MM
MM
SI
Interval
If required
≤ 5 years
≤ 5 years
≤ 5 years
Inspection
■
Visual and acoustic check
■
Read out and analyze
pump data
3)
■
Optional software update
4)
■
Prepare a recommenda-
tion for action
5)
■
Maintenance level 1 – Replacing the operating fluid reservoir
Clean the outside of the
vacuum pump, clean the
bottom part,
Replace the operating fluid
reservoir,
Function test
■
Operating fluid
reservoir
Maintenance level 2 – Replacing relevant wear parts
Clean the outside of the
vacuum pump, clean the
bottom part,
Partially disassemble the
vacuum pump,
Replace the operating fluid
reservoir,
Replace the bearing hous-
ing,
Function test
■
Spare parts
package 1 –
bearing
Maintenance level 3 – Overhaul
Dismantle and clean the
vacuum pump,
Replace all seals and wear
parts,
Function test
■
Spare parts
package 1 –
bearing
Set of seals
Tbl. 11:
Maintenance intervals
7.3 Replace operating fluid reservoir
WARNING
Risk of poisoning from contact with harmful substances
The operating fluid reservoir and parts of the turbopump may contain toxic substances from pumped
media.
► Decontaminate affected parts before carrying out maintenance work.
► Prevent health hazards or environmental impacts with adequate safety precautions.
► Observe the operating fluid safety data sheet.
► Dispose of the operating fluid reservoir according to applicable regulations.
3)
For maintenance by Pfeiffer Vacuum Service.
4)
For maintenance by Pfeiffer Vacuum Service.
5)
For maintenance by Pfeiffer Vacuum Service.
Maintenance
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