Display Problem
Possible causes
Remedy
E111
Operating materials pump
communication error
● Call Pfeiffer Vacuum Service
● Only acknowledge for rotational speed f = 0
E112
Operating materials pump
collective fault
● Call Pfeiffer Vacuum Service
● Only acknowledge for rotational speed f = 0
E114
Temperature evaluation on
output stage is faulty
● Call Pfeiffer Vacuum Service
E117
Excess temperature on pump
base
● Insufficient cooling
● Improve cooling
● Check deployment conditions
E118
Excess temperature on out-
put stage
● Insufficient cooling
● Improve cooling
● Check deployment conditions
E119
Excess temperature on bear-
ings
● Insufficient cooling
● Improve cooling
● Check deployment conditions
E143
Operating fluid pump over-
temperature
● Insufficient cooling
● Improve cooling
● Check deployment conditions
● Only acknowledge for rotational speed f = 0
E777
Nominal speed not confirmed
● Nominal speed not con-
firmed after replacing
drive electronics
● Confirm nominal speed with
[P:777]
con-
firmed
● Only acknowledge for rotational speed f = 0
F001
TMS warm-up time elapsed
● Internal timer for warm-
up monitoring elapsed
● Check deployment conditions
F003
TMS heating circuit tempera-
ture sensor
● TMS temperature not in
the permissible range
b5 °C and
85 °C
● Check deployment conditions
● Call Pfeiffer Vacuum Service
F007
Undervoltage/mains failure
● Mains failure
● Check power supply
F018
Authorization level conflict
● Pumping station switch-
ed on with
[P:010]
while
E74 input "start/stop" is
off (open)
● Switch on pumping station E74
●
[P:010]
Switch off
F021
Sealing gas signal invalid
● Sealing gas monitoring
unit signal outside the
valid range
● Check connections for sealing gas monitor-
ing
● Check parameter options for accessory out-
puts
F034
Low sealing gas flow
● Sealing gas monitoring
unit signal valid, but be-
low the set threshold
[P:
791]
● Check and improve sealing gas supply
● Check deployment conditions
F045
High motor temperature
● Insufficient cooling
● Improve cooling
● Check deployment conditions
F076
High electronics temperature
● Insufficient cooling
● Improve cooling
● Check deployment conditions
F097
Invalid pump information
● Pump data error
● Factory setting through acknowledgment
F098
Insufficient pump information
● Connection to pump
faulty
● Call Pfeiffer Vacuum Service
F100
Speed increased to minimum
value
● Permitted specifications
for speed setup mode
or standby not correct
●
[P:707]
or
[P:717]
● Refer to technical data for the turbopump
for valid speed range
F115
Temperature evaluation on
pump base is faulty
● Call Pfeiffer Vacuum Service
F116
Temperature evaluation on
bearings is faulty
● Call Pfeiffer Vacuum Service
Malfunctions
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