Pfeiffer Vacuum HICUBE ECO, Operating Instructions Manual

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LED Symbol LED status Display Meaning
Green
Off currentless
On, flashing "Pumping station OFF", speed ≤60 rpm
On, inverse flashing "Pumping station ON", nominal speed not reached
On, constant "Pumping station ON", nominal speed reached
On, blinking "Pumping station OFF", speed >60 rpm
Red
Off No error, no warning
On, flashing Warning
On, constant Errors
Tbl. 8: Response and meaning of the LEDs on the DCU
6.5.2 Temperature monitoring
If threshold values are overrun, output signals from temperature sensors allow the pumps to be brought
to a safe condition. Depending on pump type, temperature threshold values for warnings and error mes-
sages are saved unchanged in the electronic drive unit. For information purposes, various status quer-
ies are prepared in the parameter set.
● The drive power of the turbopump is reduced in case of impermissibly high motor temperature or
impermissibly high housing temperature. This can cause the motor to fall below the set rotation
speed switchpoint and so result in switching off of the pump.
● In the event of a non-permissibly high temperature (> 75 °C) of the backing pump, the motor
speed is reduced to nominal rotation speed to prevent the pump overheating. After cooling down
(< 72° C), the pump begins to run again at the set rotation speed.
6.6 Switching off and venting
Recommendation
After the turbopump is switched off, Pfeiffer Vacuum recommends venting the tur-
bopump to avoid contamination due to particles streaming back from the fore-vac-
uum area.
6.6.1 Switching off the turbo pumping station
Take the pumping station out of operation
►
Switch off the turbo pumping station.
Switch off the power supply
► Switch off the complete power supply at the main switch.
6.6.2 Venting
NOTICE
Damage to the turbopump due to non­permissibly fast pressure rise during venting
Non-permissibly high pressure rise rates place a significant load on the rotor and the magnetic bear-
ing of the turbopump. During venting very small volumes in the vacuum chamber or the turbopump,
there is a risk of uncontrollable pressure rises. This causes mechanical damage to the turbopump,
including potential failure.
► Observe the prescribed maximum pressure rise speed of 15 hPa/s .
► Avoid manual and uncontrolled venting of very low volumes.
► Where necessary, use a venting valve from the Pfeiffer Vacuum range of accessories.
Operation
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