Stud screw and threaded hole
1. Only use the approved mounting kits from Pfeiffer Vacuum for the connection.
2. Screw the required number of stud screws with the shorter screw-in end into the holes in the
counter flange.
3. If used: Insert the protective screen or splinter shield with the clamping lugs pointing downward
into the high vacuum flange.
4. Place the seal precisely in the hollow.
5. Connect the flange according to the diagram using the components in the mounting kit.
6. Tighten the screw connections all the way around.
– Tightening torque:
22 ± 2 Nm
7. After this, check the torque as flowing of the sealing material may make it necessary to tighten the
screws.
Stud screw and throughbore
1. Only use the approved mounting kits from Pfeiffer Vacuum for the connection.
2. If used: Insert the protective screen or splinter shield with the clamping lugs pointing downward
into the high vacuum flange.
3. Place the seal precisely in the hollow.
4. Connect the flange according to the diagram using the components in the mounting kit.
5. Tighten the screw connections all the way around.
– Tightening torque:
22 ± 2 Nm
6. After this, check the torque as flowing of the sealing material may make it necessary to tighten the
screws.
5.4 Connecting the exhaust side
WARNING
Danger of death from poisoning due to toxic gases being expelled without an exhaust line
Exhaust gases and vapors are released from the turbo pumping station unhindered during normal us-
age. In the case of processes with toxic media, there is a risk of injury and danger of death due to
poisoning.
► Note the corresponding regulations for handling toxic substances.
► Toxic process gases should be safely conveyed away via an exhaust line.
Installation
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