Pfeiffer Vacuum HICUBE ECO, Operating Instructions Manual

Page: 50 / 56

Pump-down time for vacuum chamber
size 10 l 557 s 834 s 143 s
Pump-down time for vacuum chamber
size 100 l 5572 s 8335 s 1428 s
Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V
Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz
Cooling method, standard Air Air Air
Relative humidity of air 5-85 %, non-condensing 5-85 %, non-condensing 5-85 %, non-condensing
Weight 13.5 kg 15.2 kg 15.1 kg
Tbl. 20: Technical data for HiCube 80 Eco, DN 63 CF­F
Classification HiCube 80 Eco HiCube 80 Eco HiCube 80 Eco
Flange (in) DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K
Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"
Turbopump HiPace 80 HiPace 80 HiPace 80
Backing pump MVP 015-2 MVP 015-4 MVP 030-3
Ultimate pressure
< 1 · 10
-7
hPa < 1 · 10
-7
hPa < 1 · 10
-7
hPa
Pumping speed for N
2
67 l/s 67 l/s 67 l/s
Pumping speed backing pump at 50 Hz 1 m³/h 0.75 m³/h 1.8 m³/h
Pump-down time for vacuum chamber
size 1 l 56 s 83 s 14 s
Pump-down time for vacuum chamber
size 10 l 557 s 834 s 143 s
Pump-down time for vacuum chamber
size 100 l 5572 s 8335 s 1428 s
Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V
Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz
Cooling method, standard Air Air Air
Relative humidity of air 5-85 %, non-condensing 5-85 %, non-condensing 5-85 %, non-condensing
Weight 12.1 kg 13.8 kg 13.7 kg
Tbl. 21: Technical data for HiCube 80 Eco, DN 63 ISO­K
Classification HiCube 300
Eco HiCube 300
Eco HiCube 300
Eco HiCube 300
Eco HiCube 300
Eco HiCube 300
Eco
Flange (in) DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F
Flange (out) Silencer,
G 1/8" Silencer,
G 1/8" Silencer,
G 1/8" Silencer,
G 1/8" Silencer,
G 1/8" Silencer,
G 1/8"
Turbopump HiPace 300 HiPace 300 HiPace 300 HiPace 300 H HiPace 300 H HiPace 300 H
Backing pump MVP 015-2 MVP 015-4 MVP 030-3 MVP 015-2 MVP 015-4 MVP 030-3
Ultimate pres-
sure
< 1 · 10
-8
hPa < 1 · 10
-8
hPa < 1 · 10
-8
hPa < 1 · 10
-10
hPa < 1 · 10
-10
hPa < 1 · 10
-10
hPa
Pumping
speed for N
2
260 l/s 260 l/s 260 l/s 260 l/s 260 l/s 260 l/s
Pumping
speed backing
pump at 50 Hz 1 m³/h 0.75 m³/h 1.8 m³/h 1 m³/h 0.75 m³/h 1.8 m³/h
Technical data and dimensions
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