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REGULAR
MAINTENANCE
1
1E4C-E-MMA01-A07-00
Check Every 560 Hours (Once a Month)
1-5-5
Checking the Air Pressure of the Process Pump
NOTICE
Before checking the air pressure of process pump, set the “1 trip” cleaning mode
to damp, with the cleaning vacuum off.
After checking the air pressure, return the cleaning data to the original settings.
1.
Press
UNLOCK
+
Mask cleaning
.
• The “Cleaning” screen appears.
• The X-Y table moves to the operator’s side.
2.
Turn off the servo switch.
3.
Open the front safety cover.
4.
Open the center safety cover, and pull
out the cleaning unit.
Tools
Required time
3 to 5 minutes
OFF ( ) ON ( )
SERVO
1B4C-EEn-Ma-001
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1B4C-405P
Summary of Contents for KXF-1E4C
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