OPTO-EDU (BEIJING) CO., LTD.
www.cnoec.com.cn Page 6 of 51 [email protected]
1.5.
Main technical data
Resolution
1.5nm@ 15kV or 30kV
Magnification
15x~500000x
Electron Gun Schottky Field Emission Gun
Accelerating Voltage 0~30kV
Lens System
Electromagnetic lens
Objective Diaphragm
Include 3 diaphragm, out of vacuum room, position
customized
Specimen Room Include 6 interface, can connect WDS
、
EDS
、
BSE and etc.
Standard Specimen Stage X 50mm/Y 50mm/Z 25mm, T=-5°~90°,R=360°
Large Specimen Stage X 80mm/Y 50mm/Z 30mm, T=-5°~90°,R=360°
Vacuum System
Fully automatic ultra-high vacuum system
1.6.
Dimension and weight
1.6.1.
Instrument Dimension
Electron optical tube section
:
800×800×1380(mm)
Electrical cabinet control part
:
600×800×1600(mm)
Operator table
:
800×1350
(
mm
)
1.6.2.
Instrument Weight
Total Weight
:
550 Kgs
1.7.
Environmental conditions for using
In order to obtain the best working condition of the instrument, ensure that the
environment's stray magnetic field, vibration, room temperature, humidity and
power supply meet the requirements of the installation environment before the
instrument is installed.
1.7.1.
Equipment requirements for the room
A63.7080 is required to be installed in an independent laboratory with strong
load-bearing capacity (floor load ≥ 246 Kg/m2) and good anti-vibration effect. The
room where the instrument is installed should be able to be shaded, and some work
needs to be done in the darkroom. At the same time, the user should be able to
provide a desk lamp for sample and photo inspection without illumination.
1.7.2.
Requirements for temperature and humidity environment
In the laboratory where A63.7080 is installed, the room temperature is
required to be constant and the humidity is small. The temperature should be kept
between 20 °C and 25 °C, the relative humidity should be less than 70%, and
equipment that guarantees to meet these requirements, such as air conditioners,
dehumidifiers, wet and dry thermometers, etc.