OPTO-EDU (BEIJING) CO., LTD.
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shutoff valve V1.
2. Click “Deflating” on the software interface and the vacuum system will
automatically deflate the sample chamber.
3. After the deflation is completed, the sample chamber door is loose and the
sample chamber is in an atmospheric state.
4.2.3.2.
Place or replace samples
After the sample chamber is deflated, loosen the sample stage lock and
rotate the Z direction counterclockwise several times so that after the sample is
changed, the sample does not hit the objective pole lower boot. Pull the sample
stage out of the sample chamber and pull it out for the convenience of the
operator. Do not use excessive force during the pull-out process to avoid
damage to the sample stage guide.
Use the replacement sample special screwdriver to loosen the fixed top
wire under the sample cup, remove the sample cup, and replace it with a new
sample cup. (The sample cup should be coated with a conductive paste or
double-sided conductive tape to bond the new sample. If the sample is not
conductive, It should be sputtered), the position is preferably 10mm from the
sample holder, the fixed top wire is tightened with a special screwdriver, and
then the sample stage is pushed back to the sample chamber.
4.2.3.3.
Vacuuming the sample chamber
Click on the “pumping” of the software interface and the vacuum system
will automatically vacuum the sample chamber. When the system begins to
enter a high vacuum state, open the V1 valve and the instrument can begin
operation.
4.2.4.
Turning on the gun power supply
The software control interface starts the electronic gun power supply into
"cold start" and "hot start". After the filament is replaced, the gun is added for
the first time. It is necessary to use the cold start. After the electronic gun is
turned off daily, the "hot start" is used to start the automatic gun adding program.
Note:
“Cold Start” and “Hot Start”: The cold start has a waiting time of 20
minutes during the gunning process. Since the field emission electron source
is deflated more when it is used for the first time, it may cause the vacuum to
drop, and it is necessary to wait for 20 minutes during the filling process.
High voltage HV and filament cannot be added until the vacuum level
has not met the requirements.
The vacuum and high pressure interlock of the system will
automatically cut off when the vacuum is low.