OPTO-EDU A63 .7080 Instruction Manual Download Page 1

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A63.7080

Scanning Electron Microscope
Std FEG SEM

Instruction Manual

Summary of Contents for A63 .7080

Page 1: ...A63 7080 Scanning Electron Microscope Std FEG SEM Instruction Manual ...

Page 2: ...ents for power supply 7 1 7 4 Requirements for vibration 7 1 7 5 Requirements for low frequency stray magnetic fields 7 1 8 Impact on the environment and energy 8 1 9 Security 8 2 System composition and working principle 9 2 1 Overall structure 9 2 2 Electron optical tube 9 2 2 1 Schottky field emission electron gun 10 2 2 2 Electron beam electromagnetic alignment system 10 2 2 3 Lens system 10 2 ...

Page 3: ...iew of the Software Interface 27 3 3 2 Scan Settings 28 3 3 3 File Management Menu 29 3 3 4 Getting images 30 4 SEM Microscope Operation Procedure 31 4 1 Preparation and inspection before use 31 4 1 1 Power Supply Check 31 4 1 2 Key position of the main rack panel 31 4 1 3 Installed the panel correctly 31 4 1 4 No people behind main unit cabinet during work 31 4 2 Operating procedures methods and ...

Page 4: ...nce work 44 5 2 Maintenance cycle 44 5 3 Normal maintenance procedures 44 5 4 Maintenance during long term parking 44 6 Transportation and Storage 45 6 1 Lifting and transportation precautions 45 6 2 Storage conditions storage period and precautions 45 7 Unpacking and Inspection 46 7 1 Unpacking Precautions 46 7 2 Inspection contents 46 7 2 1 A63 7080 Packing List For Reference Only 46 7 2 2 Instr...

Page 5: ...trument 6 The quality of the image can be appropriately improved by using electronic methods and computer technology For example the image processor can adjust the brightness and contrast of the image etc so that all light dark parts of the image can be improved to show clearly 7 Provide more image viewing methods such as using a dual magnification device or a split image selector to simultaneousl...

Page 6: ...emental quantification and qualitative component analysis When performing microscopic morphology analysis the spatial resolution can reach sub micron level it can measure the state of grain boundary or the phase identification of crystal grain and the measurement of crystal and grain orientation Distribution measurements can be made with fast multi element surface scanning and line scanning In mod...

Page 7: ...ng condition of the instrument ensure that the environment s stray magnetic field vibration room temperature humidity and power supply meet the requirements of the installation environment before the instrument is installed 1 7 1 Equipment requirements for the room A63 7080 is required to be installed in an independent laboratory with strong load bearing capacity floor load 246 Kg m2 and good anti...

Page 8: ...d wire with the instrument and ensure that the grounding resistance is less than 3Ω 1 7 4 Requirements for vibration Although the electron optical tube of A63 7080 has a vibration isolating device vibration beyond the allowable range frequency 0 to 200 Hz will have a bad influence on the normal operation of the instrument In the mounting position of A63 7080 the vibration in any direction should b...

Page 9: ...rs etc it is good for measuring or correcting problems 1 8 Impact on the environment and energy The X ray radiation of A63 7080 meets the standards required by the state and does not affect the environment and energy 1 9 Security A63 7080 is safe to use it complies to Chinese national standards for instrument safety requirements ...

Page 10: ...o optical lens barrel is capable of generating and focusing an electron beam and finally forms a small diameter beam spot on the sample The electron optical lens tube is composed of a Schottky field emission electron gun an electromagnetic centering system a lens barrel blocking valve a lens system a scanning coil assembly an astigmatism device and a signal detecting system as shown in Picture 2 1...

Page 11: ...gnetic flux leakage Under the objective lens the pole piece can be disassembled in the sample chamber and the removal of the pole piece under the objective lens does not affect the original state of the scanning coil An adjustable objective lens is mounted below the objective lens and is placed in the main plane of the objective lens by adjustment The objective lens mount can be loaded with three ...

Page 12: ...ow and an electron optic lens barrel mounted on it The sample stage is loaded from the front door of the sample chamber and the sample chamber is deflated without affecting the vacuum of other systems The sample chamber provides a working space for the sample and also facilitates attachment installation The sample chamber accessories include a high temperature stage a low temperature stage a stret...

Page 13: ...e should be 100 96 4 The large sample stage can also be rotated 360 when tilting The center of rotation is at the center of the sample holder The minimum value of the rotation reading is 0 1 The large sample stage has a range of movement of 80 mm and 60 mm in both X and Y directions The movement of the large sample stage before and after is the X direction which corresponds to the horizontal movem...

Page 14: ...to pump high vacuum system 3 Mechanical pump used for pumping system low vacuum and molecular pump pre stage vacuum 4 Connecting the pipe for the connection between the vacuum parts 5 Various valves for vacuum control for example V1 can separate the electron gun from the sample chamber When the sample chamber is deflated the electron gun can maintain the vacuum state V2 is used to pump the sample ...

Page 15: ...ial state the system can be operated manually during maintenance 2 5 Electrical cabinet control The electrical cabinet control consists of an electrical cabinet and a computer system to control various functions of the A63 7080 as well as to observe sample images take photographs etc 2 5 1 Electrical cabinet The electrical cabinet includes a circuit board a power supply etc for implementing variou...

Page 16: ...ration control software is simple friendly and intuitive It is easy for users to master and easy to communicate between users Optimized software design super fault tolerance less system resources and more stable and reliable operation The electronic mirror operation control software is on the same screen display and the image display and scanning control are combined to facilitate the user s opera...

Page 17: ...ng functions which is more convenient to use The computer operating system can be installed with electronic mirror image processing software which is a more powerful independent image processing software supports a variety of common image formats and conversion between different image formats on the basis of general image processing functions added some New features enhanced a range of image proce...

Page 18: ...tures and tools that make the use of the computer easier and more efficient For details please see the information in the Help section of the Windows 7 operating system 3 2 Software Control Panel The EMI control software desktop table is shown in Figure 3 1 Double click the figure to open the software control interface as shown in Figure 3 2 The SEM control software includes various functions of o...

Page 19: ...D www cnoec com cn Page 18 of 51 sale cnoec com 3 2 1 Software Scan Control Window Figure 3 3 3 4 show main function meaning of software Figure 3 3 Scan Control Window Menu bar Key bar Function field Main field Status field ...

Page 20: ...tion Note Mouse operation After clicking the active block on the toolbar drag the mouse to fine tune the corresponding parameters After double clicking the active block on the toolbar drag the mouse to thicken the corresponding parameters The right mouse button determines the current parameter value ...

Page 21: ...ration information when the last use is opened by default Figure 3 6 Click VAC To Closc 1 To close software click VAC 2 Wait until all indicator lamp power off 3 Close software The last used configuration information will be saved automatically 3 2 3 Function buttons The scan control window function button and status display are shown in Figure 3 7 The function buttons indicate the meaning as show...

Page 22: ...OPTO EDU BEIJING CO LTD www cnoec com cn Page 21 of 51 sale cnoec com Table 3 1 Function Keys Meaning ...

Page 23: ... as shown in Figure 3 8 Divided into vacuum control zone gun parameter setting zone error prompt zone including all functions of electronic gun parameter setting and monitoring Vacuum control zone Pump button is used to automatically vacuum the system when changing samples click Vent to deflate the sample chamber Open V1 button to control the switch of V1 valve click Advance button to pop up advan...

Page 24: ...OPTO EDU BEIJING CO LTD www cnoec com cn Page 23 of 51 sale cnoec com Figure 3 8 Electron Gun Function Window Figure 3 9 Advance Function Window Vacuum Settin g Gun Setting Error Hint ...

Page 25: ... gun ie ColdBoot or Auto On turn off the gun and click Auto Off to set the high voltage value Acce lV and the filament current value C1 Lens The error prompt area is used to display high voltage and gun error status The box is green indicating no error the box is yellow indicating a communication error the box is red indicating a serious error you must click the button to clear it 3 2 5 Electrical...

Page 26: ...ectrical displacement Figure 3 4 电位移调节 3 2 7 Main function area The main function area of the scan control window is shown in Figure 3 12 In the function area the function bar for adjusting brightness contrast adjusting focus and magnification is included which can easily adjust various parameters ...

Page 27: ...OPTO EDU BEIJING CO LTD www cnoec com cn Page 26 of 51 sale cnoec com Figure 3 5 Scan Control Window Table 3 3 Scan Control Function ...

Page 28: ...rview of the Software Interface The software control interface is shown in Figure 3 13 including the menu bar toolbar Figure image display area and scan control area After opening the control software follow the corresponding function adjustment to get the Figure image in the figure image display area ...

Page 29: ...ring the adjustment of the Figure image right click on the Figure image area to see the interface shown in Figure 3 14 Click on the corresponding option to make the relevant settings Click on settings to set the detector type scan speed sync mode etc as shown in Figure 3 15 Figure 3 7 Scan Setting Figure 3 8 Scan Speed Setting ...

Page 30: ... the menu bar file to save or print the Figure image as shown in Figure 3 16 There is a shortcut to save the Figure image in the toolbar As shown in Figure 3 17 you can select the storage location and name the Figure image file Figure 3 9 Save Image Figure 3 10 Save File Shortcut Figure 3 11 Name The File ...

Page 31: ...30 of 51 sale cnoec com 3 3 4 Getting images The toolbar of the software interface has a shortcut to scan the Figure image as shown in Figure 3 19 and the functions are shown in the table Figure 3 12 Scan Button Table 3 4 Scan Image Button Meaning ...

Page 32: ...ing the cable and the air pipe causing personal danger or damage to the instrument When taking high resolution photos it is also required that there should be no people walking behind the main unit and the electrical cabinet and the generated vibration will affect the figure image 4 2 Operating procedures methods and precautions for starting the electron microscope Description of Standby Status an...

Page 33: ...y completes the pumping process and the operation is simple and convenient 5 Bake the vacuum system to obtain an ultra high vacuum 4 2 2 2 Manual The manual mode is mainly used for instrument maintenance Includes vacuum leaks and electrical repairs In this way pay special attention to whether the switches of the respective valves are correct 1 Turn on the mechanical pump power switch turn on the a...

Page 34: ...e the power is on 5 If the lens barrel is not deflated do not remove the objective light mast 6 Always turn off the V1 valve before turning off the electrical cabinet CONSOLE POWER 7 Do not manually activate the molecular pump and open the V1 valve while the sample chamber is deflated 8 The electron optical lens of the electron microscope has been pre adjusted to the optimum state before delivery ...

Page 35: ...e position is preferably 10mm from the sample holder the fixed top wire is tightened with a special screwdriver and then the sample stage is pushed back to the sample chamber 4 2 3 3 Vacuuming the sample chamber Click on the pumping of the software interface and the vacuum system will automatically vacuum the sample chamber When the system begins to enter a high vacuum state open the V1 valve and ...

Page 36: ...mplified The change in brightness is to adjust the DC level of the video signal the contrast change is to adjust the voltage of the photomultiplier that is to change the amplification gain which is equivalent to changing the contrast of the Figure image 4 2 5 3 Adjusting the electrical alignment The electrical alignment can correct the deflection of the electron beam The electron gun mainly adjust...

Page 37: ...ng the objective lens to match the axis requires multiple exercises and accumulation of experience especially in the process of obtaining high resolution images If the objective lens does not have a hinge the image is difficult to focus clearly and the astigmatism is large When observing the high magnification Figure image the effect is more obvious 4 2 5 5 Image Focusing Adjusting the current of ...

Page 38: ...creen when the knob is turned counterclockwise the sample moves from right to left in the X direction of the screen The amount of movement of the sample in the X direction is 0 50 mm 25 mm is the center position and is indicated by a scale Rotate the knob on the gate of the sample chamber marked with Y and the sample moves in the Y direction When the knob is turned clockwise the sample moves up an...

Page 39: ...sample to avoid touching the electron detector Larger samples can be observed at a low working distance of 20 24 mm 4 2 7 Sample Preparation Sample preparation by SEM is very simple Take a sample and stick it on the sample cup with conductive or conductive tape If the sample is not conductive stick the sample to the sample cup with conductive paste or conductive tape and then sputter a conductive ...

Page 40: ... procedures methods precautions for shutdown 4 4 1 Daily standby status Click Close V1 Valve in the software interface the electron microscope can be in standby state 4 4 2 Shutdown Status Close the V1 valve click the software interface automatic retreat button wait for the software to automatically complete the gun withdrawal step close the software control interface close the electrical cabinet ...

Page 41: ... for example Cleaning the scanning coil Cleaning the entire electron optical tube A63 7080 machine movement etc 5 1 Maintenance during operation 5 1 1 Replacing Scintillator of the Secondary Electron Detector When the scintillator is bombarded by the electron beam for a long time surface contamination is caused and a charge is accumulated on the surface of the scintillator to cause a discharge phe...

Page 42: ...ows 1 Click on Deflation until the sample door is loose Figure 5 1 Objective Diaphragm 2 Turn the knurled knob on the light lever counterclockwise until the thread is completely disengaged 3 Pull the light lever out by hand and place it on a clean lint free cloth The reverse side ie the matte side of the diaphragm is up as shown in Figure 51 4 Use a pair of tweezers against the top post of the fix...

Page 43: ...ed or not there are still black spots stains and residual polishing paste if there is residue it needs to be re polished or brushed until it is completely clean Figure 5 2 Remove Diaphram from Bar 10 Dehydrate the optical mast with absolute ethanol and blow dry with a hot air blower 11 Install the rubber O ring that you just removed on the sealing groove of the light rod 12 Place the three objecti...

Page 44: ...pil it will affect the image quality so you need to be very careful Place the diaphragm on a clean lint free cloth and gently clip the edges with tweezers 13 The three objective lenses are mounted in the optical mast The back side is mounted upwards and is fixed with a top post and a small spring 14 Apply a thin layer of vacuum grease to the rubber O ring of the light rod 15 Insert the light rod i...

Page 45: ...rformed by a professional engineer appointed by the manufacturer Authorized by the manufacturer and engineered by an engineer who has been specially trained and qualified by the manufacturer 5 2 Maintenance cycle Each year the unit need to be inspected and repaired by engineer and be checked under normal working conditions to eliminate potential hazards 5 3 Normal maintenance procedures 请参见服务程序中所述...

Page 46: ...ry ventilated non corrosive gas house before opening the box to prevent inversion rain cold and exposure The storage room temperature is 10 C 40 C the relative humidity is not more than 80 Since the inside of the electro optical lens barrel of A63 7080 is vacuumed at the factory it is best to complete the installation within one month after arrival to ensure the vacuum inside the lens barrel to av...

Page 47: ...s of unpacking check the A63 7080 Product Packing List and check it in time to avoid missing parts 7 2 Inspection contents The user needs to confirm the completeness of the A63 7080 product and the appearance of the instrument during the unpacking process 7 2 1 A63 7080 Packing List For Reference Only No Name 数量单位 1 A63 7080 Scanning Electron Microscope 1 Set 2 Carbon conductive tape 1 Disc 3 Bam...

Page 48: ...D www cnoec com cn Page 47 of 51 sale cnoec com 7 2 2 Instrument appearance inspection Under the condition of sufficient light visual observation the appearance of the instrument should be free of large scratches and stains ...

Page 49: ...rrives the user will be notified to arrive in time for installation The main contents of the installation work are 1 The installer will unpack and inspect the goods together with the user according to the Packing List 2 After the installation and commissioning of the installer is completed the user will check the instrument item by item according to the requirements of the Installation Acceptance ...

Page 50: ...e explained to the user Other things that need to be explained to the user include To ensure the normal operation of the instrument please do not install any applications and software that are not related to this in the instrument system computer to avoid damage to the system control Because there are high voltage power supplies and related equipment in the system if you have any related problems ...

Page 51: ...Scanning Electron Microscope 镜筒 COLUMN Electron optical tube column 分辨率 RESOLUTION Max resolution 工作距离 Working Distance WD Distance between sample surface to objective lens 束流 PROBE CURRENT Electron Beam Probe Current 束斑尺寸 SPOT SIZE Size of electron beam spot on sample surface 高压 High Voltage HV Electron Beam Accelerating Voltage 单击 Click Single Click on left button of mouse 双击 Double click Double...

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