Olympus USPM-RUIII Series, Hardware Operation Manual

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13. About the Alarm and Error Indications
PV6253-F4E016 62
 “The Refractive index file did not load”
Even though [File Setup] was selected in the coat refractive index setup, the coat material
refractive index data file (*.ind) has not been loaded. Specify the file at the [File] tab.

“The refraction index data did not load”
Even though "Calculate using board refractive index" was selected in the coat refractive index
setup, the substrate data file (*.csv) has not been loaded. Specify the file at the [Board] tab.
13.3. Operational errors
 “An error occurred in the film thickness calculation because less than two
points exist”
Film thickness measurement is calculated based on the wavelengths of two detected peaks or
valleys. When issued, this error means that there were not two or more peaks or valleys in the
measurement range (400 to 780 [nm]).
 “Number of peaks detected exceeds the maximum number or detections
allowed (The maximum number of peaks:50)”
In a film thickness measurement, peaks or valleys are detected over the entire measurement
range (400 to 780 [nm]). While the detection count varies with the type of measurement, a
maximum of 50 is allowed, respectively, when peaks only, valleys only, or peaks and valleys
are detected. If this number is surpassed, an error will be output.
The cause of this error is likely to reside in that the measured data of spectral reflectances
is so unstable that minute noise is likely detected as a peak or valley. This situation will
improve when the sampling time in the system setup is increased in order to suppress noise
in the measured data.
 “An error occurred while calculating the film thickness”
An error occurred in the calculation of film thicknesses. Check the settings of the coat
material refractive index, etc.
13.4. Combination error
 “The combination of 'Type C' and 'Calculation using board refraction index' is
not allowed”
"Type C" cannot perform calculation using "Calculate using board refractive index". Check
the settings of the measurement type.