3.6
Connecting the purge gas and airing device
See Section 4.1 for suited gases, see Section 4.6 for different venting
methods.
TURBOVAC 35 LS, 35 LS2 and 50 with KF or ISO-K connectors
The
TURBOVAC
is aired through the system.
TURBOVAC 50 with CF connector and 151, 361
If the pump cannot be aired through the system, then a power failure airing
valve shall be attached to the airing connection flange. This power failure
airing valve prevents oil vapor from the forevacuum line from diffusing back
into the system.
TURBOVAC 151 C, 361 C, 600 C and 1000 C
Either attach a power failure airing valve to the airing connection flange or a
purge gas and airing valve at the purge gas connection flange.
Which of the two flanges is used will depend on the process.
When pumping
clean, non-corrosive gases
, a power failure airing valve is
to be attached.
When pumping
reactive media
, connect a purge gas and airing valve.
Please contact Oerlikon Leybold Vacuum for assistance in making the decisi-
on as to which media can be pumped with or without purge gas.
In processes which require purge gas the pump will have to be aired, when it
is switched off, through the purge gas valve.
Observe the operating instructions for the purge gas and airing valve.
Installation
22
GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
