4.3
Bakeout
If pressures in the range of 10
-8
mbar are to be developed within a short peri-
od of time, the vacuum chamber and the components installed therein will
have to be baked out. In addition, the
TURBOVAC
can be baked out using
the flange heater provided for this purpose.
Protect the rotor against intensive, direct heat radiation. When baking out at
the forevacuum side – at a sorption trap, for example – ensure that the com-
ponents attached direct are not heated to more than 80
°
C (176
°
F).
The forevacuum pump must be in operation so as to eliminate the vapors
liberated at the sorption trap.
4.4
Operation
Risk of injury!
The pump can become so hot during operation (> 70
°
C, 158
°
F) as to
represent a burn hazard. Note the symbols on the pump pointing to the
hazards, and in the case of a hot pump wear the required protective
clothing.
Exposure of the pump to accelerating forces must be avoided or reduced
to such an extent that the rotor unit will not be excited by vibrations. In
the case of critical applications you must consult our Applications Dept.
first.
4.5
Switching Off
Switch off the
TURBOVAC
at the
TURBOTRONIK
.
Refer to the
TURBOTRONIK
operating instructions for details.
Switch off the forevacuum pump.
Vent the
TURBOVAC
before it has come to a full standstill; refer to Section
4.6.
In
TRIVAC
pumps the built-in anti-suckback valve will close automatically and
shut off the forevacuum line. When using forevacuum pumps without an
anti-suckback valve, close the valve in the forevacuum line.
Close off the cooling water supply or switch off the ventilation immediately
after switching off the
TURBOVAC
in order to avoid condensate formation in
the pump.
If the pump previously handled corrosive gases, it will be necessary to purge
the pump with dry nitrogen for one hour prior to shut-down. When the
system is not in operation, ensure that neither ambient air nor cleaning
agents can enter the
TURBOVAC
.
Operation
26
GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Caution
Warning
Venting
