Flange heating
(only for pumps with the CF flange)
The flange heater is used to bake out, under automatic control, the high-
vacuum connection port at the TURBOVAC and the mating flange on the
vacuum chamber.
The bakeout jacket or flange heater is mounted directly to the TURBOVAC
intake flange. This can be done even with the pump flanged to the vacuum
chamber.
Risk of injury!
The pump can become so hot during operation (> 70
°
C, 158
°
F) as to
represent a burn hazard. Shield the hot components against contact.
The pump running noise is below 70 dB(A); no noise-insulating measures are
required.
Installation
19
GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Fig. 6 Schematic of a turbomolecular pump system
1
Turbomolecular pump
2
Forevacuum test point
3
Forevacuum pump
4
Anti-vibration bellows
5
Adsorption trap
6
Forevacuum valve
7
Airing valve
8
High-vacuum valve
9
Purge gas connection
10 Valve in the roughing pump line
11 Electronic frequency converter
— — — — Roughing pump line; recommended
to achieve the shortest possible cycling times
— · — · — · — · Drive and control line
Warning
