971B UniMag™
3
Operation manual
Proprietary Information
This document contains confidential proprietary information belonging to MKS Instruments, Inc. This information
is not for publication and has been provided to MKS on the condition that it not be copied, reproduced or
disclosed, either wholly or in part, to third parties without the expressed written consent of MKS Instruments, Inc.
The information contained in this document is subject to change without notice.
Copyright Information
© 2020 MKS Instruments, Inc. All rights reserved. Granville-Phillips
®
is a registered trademark
of MKS Instruments, Inc., and mksinst™, DualTrans™, MicroPirani™, UniMag™, DualMag™,
TriMag™, and QuadMag™ are trademarks of MKS Instruments Inc. Windows
®
is a trademark
of Microsoft Corporation.
All other trademarks and registered trademarks are the properties of
their respective owners.
No part of this work may be reproduced by any method including photocopying and recording
or by any information or retrieval system without written permission of MKS Instruments, Inc.
Table of Contents
Proprietary Information .......................................................................................................... 3
Copyright Information ............................................................................................................ 3
Table of Contents .................................................................................................................. 3
Safety Information ................................................................................................................. 4
Symbols used .................................................................................................................... 4
Safety Precautions ............................................................................................................ 4
Unpacking ............................................................................................................................. 5
Description ............................................................................................................................ 6
971B Functions ................................................................................................................. 7
LED Status Indicator .......................................................................................................... 7
Transducer Installation (Mechanical) ..................................................................................... 8
Transducer Installation (Electrical) ........................................................................................ 9
Serial user interface ......................................................................................................... 11
Communication Protocol ..................................................................................................... 12
Setpoint relays ................................................................................................................. 14
Integrated Touch Display .................................................................................................... 16
Cold Cathode Sensor Control .......................................................................................... 18
Calibration and Adjustment ................................................................................................. 21
Factory Defaults .................................................................................................................. 22
Resetting to factory default .............................................................................................. 22
Transducer Lock Function ................................................................................................... 23
Status Query Commands .................................................................................................... 24
Analog Output ..................................................................................................................... 25
Analog output setup ......................................................................................................... 26
Query Command List .......................................................................................................... 30
Setup and configuration command list ............................................................................. 31
FAQ (Frequently Asked Questions)..................................................................................... 32
Troubleshooting .................................................................................................................. 34
Service and Repair ............................................................................................................. 35
Specifications ...................................................................................................................... 36
Accessories and Replacement Parts ................................................................................... 39
PDR 900 Display and Power Supply ................................................................................... 40
Index ................................................................................................................................... 41
