971B UniMag™
30
Operation manual
Query Command List
Communication information
Command
Response
Explanation
@xxxBR?;FF
@xxxACK9600;FF
Communication baud rate (4800, 9600, 19200, 38400, 57600,
115200,230400)
@xxxAD?;FF
@xxxACK253;FF
Transducer communication address (001 to 253)
@xxxRSD?;FF
@xxxACKON;FF
Communication delay between receive and transmit sequence.
Pressure reading
Command
Response
Explanation
@xxxPR1?;FF
@xxxACK1.23E-5;FF
MicroPirani sensor pressure as 3 digit floating point value.
@xxxPR2?;FF
@xxxACK1.23E-5;FF
Cold Cathode sensor pressure as 3 digit floating point value.
@xxxPR3?;FF
@xxxACK1.23E-5;FF
Combined Cold Cathode and MicroPirani pressure (3 digits).
@xxxPR4?;FF
@xxxACK1.234E-5;FF
Combined Cold Cathode and MicroPirani pressure (4 digits).
@xxxPR5?;FF
@xxxACK1.234E-5;FF
Cold Cathode sensor pressure as 3 digit floating point value.
Setpoint information
Command
Response
Explanation
@xxxSS1?;FF
@xxxSS2?;FF
@xxxSS3?;FF
@xxxACKSET;FF
Set point relay 1-3 status (SET=Relay energized / CLEAR=Relay
deenergized)
@xxxSP1?;FF
@xxxSP2?;FF
@xxxSP3?;FF
@xxxACK1.00E-2;FF
Set point 1-3 switch value.
@xxxSH1?;FF
@xxxSH2?;FF
@xxxSH3?;FF
@xxxACK1.10E-2;FF
Set point 1-3 hystereses switch value.
@xxxEN1?;FF
@xxxEN2?;FF
@xxxEN3?;FF
@xxxACKOFF;FF
Set point 1-3 enable status ( OFF, CC=Cold Cathode)
@xxxSD1?;FF
@xxxSD2?;FF
@xxxSD3?;FF
@xxxACKBELOW;FF
Set point relay direction (ABOVE or BELOW)
If set to above relay will be energized above setpoint value. If set to
below relay will be energized below setpoint value.
Transducer information
Command
Response
Explanation
@xxxMD?;FF
@xxxACK971B;FF
Model number (971B)
@xxxDT?;FF
@xxxACKUniMag;FF
Device type name (UniMag)
@xxxMF?;FF
@xxxACKMKS;FF
Manufacturer name (MKS)
@xxxHV?;FF
@xxxACKA;FF
Hardware version
@xxxFV?;FF
@xxxACK1.12;FF
Firmware version
@xxxSN?;FF
@xxxACK10350123456;FF Serial number
@xxxSW?;FF
@xxxACKON;FF
Switch enable
@xxxTIM?;FF
@xxxACK123;FF
Time on (hours of operation)
@xxxTIM2?;FF
@xxxACK24;FF
High voltage time on (hours of operation with HV enabled)
@xxxTIM3?;FF
@xxxAC1.23E-3;FF
Cold cathode pressure dose
@xxxUT?;FF
@xxxACKVACUUM1;FF
User programmed text string (user tag)
@xxxT?;FF
@xxxACKO;FF
Transducer status check
Calibration and adjustment information
Command
Response
Explanation
@xxxU?;FF
@xxxACKTORR;FF
Pressure unit setup (Torr, mbar or Pascal)
@xxxAO1?;FF
@xxxACK10;FF
Analog voltage output 1: Pressure assignment and calibration. (first
digit is pressure assignment, second and third digit is calibration)
xxx
= Transducer communication address (001 to 253. Broadcast addresses: 254, 255)