971B UniMag™
5
Operation manual
Unpacking
Before unpacking your 971B UniMag transducer, check all surfaces of the packing material for shipping
damage. Inspect for visible damage. If found, notify the carrier immediately.
Please be sure that your 971B package contains these items:
Part number
Description
971B-xxxxx
971B Transducer
100017130
Short form manual
100017096
Documentation & Software CD
If any items are missing, call MKS Customer Service at
+1-833-986-1686
or your local MKS sales office
or distributor.
Part Number
The 971B UniMag part number system has 5 digits that identify flange, communication interface, analog
output type, I/O connector and sensor sealing type. Transducers can be delivered with customer configuration
of various parameters like setpoint settings and these specials have additional 4 digits after the regular part
number.
Fl
an
ge
In
te
rf
ac
e
A
na
lo
g
ou
t
C
on
ne
ct
or
Re
la
ys
Enc
lo
su
re
se
al
in
g
971B-
1
1
0
2
0
0 Standard / viton sealing
2 SUBD 15pinHD male / no relay
3 SUBD 15pinHD male / 3 relays
5 SUBD 15pinHD male / 3 relays / Dual Aout
8 RJ45/FCC68 8 pin (Edwards type)
9 Hirschmann 6 pin (Pfeiffer / Inficon type)
0 Standard mks
1 Edwards APG-L
3 Edwards WRG
5 Inficon MPG400 / Pfeiffer PKR251
6 Inficon BPG400 (999 DAC2)
1 RS232 / Analog
2 RS485 / Analog
0 Custom
2 KF25
7 CF2.75
9 KF40
Special versions
Part number
971B-x1090-0001 Pfeiffer IKR251 pin and output compatible
971B-x1080-0002 Edwards AIM-S pin and output compatible
971B-x1080-0003 Edwards AIM-X pin and output compatible