MKS UniMag 971B, Operation And Installation Manual, Page: 27 / 42

971B UniMag™ 27 Operation manual
Analog output calibration = 3 (Edward WRG emulation)
The WRG emulation covers a wider measuring range than supported by the 971B range.
P
Torr
= 10
(1.5× Vout -12.125)
V
out
= (log
10
(P
Torr
)+12.125) / 1.5
P
mbar
= 10
(1.5× Vout -12)
V
out
= (log
10
(P
mbar
)+12) / 1.5
P
Pascal
= 10 (1.5× Vout -10) V
out
= (log
10
(P
Pascal
)+10 ) / 1.5
Torr mbar Pascal Vout
1.00E-8 1.33E-8 1.33E-6 2.75
2.37E-8 3.16E-8 3.16E-6 3.00
7.50E-7 1.00E-6 1.00E-4 4.00
2.37E-5 3.16E-5 3.16E-2 5.00
7.50E-4 1.00E-3 1.00E-1 6.00
2.37E-2 3.16E-2 3.16 7.00
7.50E-1 1.00 100 8.00
2.37 31.6 3.160 9.00
750.0 1.000 100.000 10.00
Analog output calibration = 5 (Inficon MPG400 / Pfeiffer PKR251 emulation)
P
Torr
= 10
((Vout -6.875)/0.6)
V
out
= log
10
(P
Torr
) ×0.6+6.875
P
mbar
= 10
((Vout -6.8)/0.6)
V
out
= log
10
(P
mbar
) ×0.6+6.8
P
Pascal
= 10
((Vout -5.6)/0.6)
V
out
= log
10
(P
Pascal
) ×0.6+5.6
Torr mbar Pascal Vout
1.00E-8 1.33E-8 1.33E-6 2.075
1.00E-7 1.33E-7 1.33E-5 2.675
1.00E-6 1.33E-6 1.33E-4 3.275
1.00E-5 1.33E-5 1.33E-3 3.875
1.00E-4 1.33E-4 1.33E-2 4.475
1.00E-3 1.33E-3 1.33E-1 5.075
1.00E-2 1.33E-2 1.33E+0 5.675
1.00E-1 1.33E-1 1.33E+1 6.275
1.00E+0 1.33E+0 1.33E+2 6.875
1.00E+1 1.33E+1 1.33E+3 7.475
1.00E+2 1.33E+2 1.33E+4 8.075
7.60E+2 1.01E+3 1.01E+5 8.603