971B UniMag™
36
Operation manual
Specifications
Measuring range (N
2
and Air):
1×10
-8
to 5×10
-3
Torr
Cold cathode
Accuracy Cathode
(1)
1×10
-8
to 1x10
-3
Torr:
±30% of reading
Supply Voltage:
9 – 30 VDC
Power consumption:
< 2 Watt
Fuse (thermal recoverable):
200 mA
Analog output (MKS standard):
1-9 VDC
Analog output 1 resolution:
16 bit
Analog output 2 resolution:
12 bit
Analog output impedance:
100 Ω
Analog output update rate:
16 Hz
Setpoint relay range:
1×10
-8
to 5×10
-3
Torr
Setpoint relay contact rating:
1A / 30 VDC/AC (resistive load)
Setpoint relay contact resistance:
100 mΩ (max)
Setpoint relay contact endurance (30VDC/1A load):
100.000 (min)
Setpoint relay contact endurance (30VDC/0.2A load):
2.000.000 (min)
Setpoint relay response time:
<100 ms
Materials exposed to vacuum:
304 and 403 stainless steel, Viton®,
Cu-Ni and Ag-Cu alloy, ceramic, titanium
Internal volume:
KF25 flange
3.6 cm
3
CF2.75” flange
1.9 cm
3
KF40 flange
3.1 cm
3
Housing material:
Stainless steel 304
Flange material:
Stainless steel 304
Weight: KF25 flange 360 g
CF2.75” flange 570 g
KF40 flange 390 g
Operating temperature:
0 to 40
o
C (32 to 104
o
F)
Bake out temperature (Power off):
85
o
C (185
o
F)
Humidity:
0 – 95% Non-condensing
Ingress Protection Rating:
IP40 / IP54
(2)
(1) Accuracy and repeatability are typical values measured in Nitrogen atmosphere when the transducer is
new. (2) Special 925 version available with IP 54 rating.