pg. 24
Serial Number - SN
Specifies transducer serial number:
Query:
@253SN?;FF
Query reply:
@253ACK1125123456;FF
Time ON - TIM
The TIM command returns the number of hours the transducer has been on:
Query:
@253TIM?;FF
Query reply:
@253ACK123;FF
Temperature - TEM
The TEM command returns the MicroPirani on chip sensor temperature
o
C within ±3
o
C.
Query:
@253TEM?;FF
Query reply:
@253ACK2.50E+1;FF
Transducer Status - T
The T command returns the MicroPirani sensor status as O for OK, M for MicroPirani fail or Z for Piezo fail.
Query:
@253T?;FF
Query reply:
@253ACKO;FF
Analog output
The 910 transducer provides a voltage output as function of pressure.
The standard output is 1 VDC/decade but can also be configured to emulate other analog outputs.
Analog output calibration = 0 (MKS standard 1 VDC/decade)
P
Torr
= 10
(Vout – 6)
V
out
= log
10
(P
Torr
) + 6
P
mbar
= 10
(Vout – 6)
V
out
= log
10
(P
mbar
) + 6
P
Pascal
=10
(Vout – 4)
V
out
= log
10
(P
Pascal
) + 4
The standard MKS analog output always provides 1 VDC/decade. If the transducer pressure unit is changed
from Torr to Pascal or mbar the analog output scaling will change as well, so it represents 1 VDC/decade
Torr or 1 VDC/decade mbar or Pascal.
