MKS 910 DualTrans Series, Operation And Installation Manual

Page: 42 / 60

pg. 42
Analog Output calibration = 29 (K6080)
Torr mbar Pascal Vout
7.50E-06 1.00E-05 1.00E-03 0.4
3.75E-05 5.00E-05 5.00E-03 0.4
7.50E-05 1.00E-04 1.00E-02 0.4
3.00E-04 4.00E-04 4.00E-02 0.4
6.00E-04 8.00E-04 8.00E-02 0.4
7.50E-04 1.00E-03 1.00E-01 0.41
3.00E-03 4.00E-03 4.00E-01 0.48
3.75E-03 5.00E-03 5.00E-01 0.5
6.75E-03 9.00E-03 9.00E-01 0.55
1.50E-02 2.00E-02 2.00E+00 0.61
3.75E-02 5.00E-02 5.00E+00 0.79
4.13E-02 5.50E-02 5.50E+00 1.1
4.50E-02 6.00E-02 6.00E+00 1.37
6.00E-02 8.00E-02 8.00E+00 1.6
7.50E-02 1.00E-01 1.00E+01 1.83
1.50E-01 2.00E-01 2.00E+01 2.64
2.60E-01 3.47E-01 3.47E+01 3.2
4.12E-01 5.50E-01 5.50E+01 3.71
5.31E-01 7.08E-01 7.08E+01 4
7.50E-01 1.00E+00 1.00E+02 4.45
1.14E+00 1.51E+00 1.51E+02 5
1.72E+00 2.29E+00 2.29E+02 5.44
3.00E+00 4.00E+00 4.00E+02 6.12
4.50E+00 6.00E+00 6.00E+02 6.8
4.88E+00 6.50E+00 6.50E+02 7.4
5.25E+00 7.00E+00 7.00E+02 7.96
6.00E+00 8.00E+00 8.00E+02 8.5
7.50E+00 1.00E+01 1.00E+03 9.01
1.50E+01 2.00E+01 2.00E+03 9.45
3.00E+01 4.00E+01 4.00E+03 9.7
4.50E+01 6.00E+01 6.00E+03 9.78
7.50E+01 1.00E+02 1.00E+04 9.85
1.50E+02 2.00E+02 2.00E+04 9.92
3.00E+02 4.00E+02 4.00E+04 9.95
4.50E+02 6.00E+02 6.00E+04 9.96
6.00E+02 8.00E+02 8.00E+04 9.98
7.60E+02 1.00E+03 1.00E+05 10
Analog Output calibration = 30 (Inficon PEG100)
Torr mbar Pascal Vout
1.00E-08 1.33E-08 1.33E-06 2.186111
1.00E-07 1.33E-07 1.33E-05 3.516111
1.00E-06 1.33E-06 1.33E-04 4.846111
1.00E-05 1.33E-05 1.33E-03 6.176111
1.00E-04 1.33E-04 1.33E-02 7.506111
5.00E-04 6.67E-04 6.67E-02 8.435741
1.00E-03 1.33E-03 1.33E-01 8.836111
1.00E-02 1.33E-02 1.33E+00 10.16611