pg. 28
Analog output calibration = 4 (Inficon PSG500 / Oerlikon TTR91)
The TTR91 emulation provides a log linear output. The output does not provide a pressure dependent signal
at pressures below 2.00E-4 Torr.
P
Torr
= 10
((Vout -6.304)/1.286)
V
out
= log
10
(P
Torr
)
×1.286+6.304
P
mbar
= 10
((Vout -6.143)/1.286)
V
out
= log
10
(P
mbar
) ×1.286+6.143
P
Pascal
= 10
((Vout -3.572)/1.286)
V
out
= log
10
(P
Pascal
) ×1.286+3.572
Torr
mbar
Pascal
Vout
1.00E-05
1.33E-05
1.33E-03
1.547
2.00E-04
2.67E-04
2.67E-02
1.547
5.00E-04
6.67E-04
6.67E-02
2.058
1.00E-03
1.33E-03
1.33E-01
2.446
1.00E-02
1.33E-02
1.33E+00
3.732
1.00E-01
1.33E-01
1.33E+01
5.018
1.00E+00
1.33E+00
1.33E+02
6.304
1.00E+01
1.33E+01
1.33E+03
7.59
1.00E+02
1.33E+02
1.33E+04
8.876
7.60E+02
1.01E+03
1.01E+05
10.00873
Analog output calibration = 5 (Inficon MPG400 / Pfeiffer PKR251 emulation)
P
Torr
= 10
((Vout -6.875)/0.6)
V
out
= log
10
(P
Torr
)
×0.6+6.875
P
mbar
= 10
((Vout -6.8)/0.6)
V
out
= log
10
(P
mbar
) ×0.6+6.8
P
Pascal
= 10
((Vout -5.6)/0.6)
V
out
= log
10
(P
Pascal
) ×0.6+5.6
Torr
mbar
Pascal
Vout
1.00E-08
1.33E-08
1.33E-06
2.075
1.00E-07
1.33E-07
1.33E-05
2.675
1.00E-06
1.33E-06
1.33E-04
3.275
1.00E-05
1.33E-05
1.33E-03
3.875
1.00E-04
1.33E-04
1.33E-02
4.475
1.00E-03
1.33E-03
1.33E-01
5.075
1.00E-02
1.33E-02
1.33E+00
5.675
1.00E-01
1.33E-01
1.33E+01
6.275
1.00E+00
1.33E+00
1.33E+02
6.875
1.00E+01
1.33E+01
1.33E+03
7.475
1.00E+02
1.33E+02
1.33E+04
8.075
7.60E+02
1.01E+03
1.01E+05
8.603
