MKS 392 Series, User Instruction Manual

Page: 15 / 39

EtherCAT
®
Communication Protocol Manual
– p/n 20021549-001 Rev. B
15
Index Sub-
Index
Data Type Backup(B)/
Save(S)?
Access PDO
Assignable?
Name Description
0x600E Input Trip Point 1
0x01 BOOL RO TX Status High Trip 1: High Trip asserted
0x02 BOOL RO TX Status Low Trip 1: Low Trip asserted
0x600F Input Trip Point 2 Trip Point 2
0x01 BOOL RO TX Status High Trip 1: High Trip asserted
0x02 BOOL RO TX Status Low Trip 1: Low Trip asserted
0x6015 Input Hot Cathode Ion Gauge
0x01 BOOL RO TX Reading Valid Indicates whether the Sensor Value contains a valid value
within the specified accuracy or not
0: invalid
1: valid
0x02 BOOL RO TX Overrange Exceeded Set to 1 if overrange exceeded
0x03 BOOL RO TX Underrange Exceeded Set to 1 if underrange exceeded
0x05 BOOL RO TX Emission Status Off/On 0: Off
1: On
0x06 BOOL RO TX Degas Status Off/On 0: Off
1: On
12 Output Data of Modules
Contains Configuration.
Table 14: Configuration Data of Module Objects
Index
Sub-
Index
Data Type Backup(B)/
Save(S)?
Access PDO
Assignable?
Name Description
0x8015
Configuration
Hot Cathode Ion
Gauge
Hot Cathode Ion Gauge
0x01 BOOL B/S RW Filament User Mode 0: Automatic - active filament is always changed when the
filament is switched on
1: Manual - filament selection is static as defined by
“Active Filament”
In either configuration, both filaments may be active at
high emission.
In either configuration, both filaments will be degassed
(only one filament is degassed at a time).