MKS 392 Series, User Instruction Manual

Page: 21 / 39

EtherCAT
®
Communication Protocol Manual
– p/n 20021549-001 Rev. B
21
Bit Description 392 Comments
7 Sensor filament 8 alarm Not used
8 Exceeded maximum C/E ratio Not used
9 Electronics failure Non-volatile memory failure, invalid internal communication
10 Over temperature of electronics Not used
11 Over pressure emission off Not used
12 Environment failure Not used
13 Reserved Not used
14 Reserved Not used
15 Configuration exception Not used
13 Semiconductor Device Profile Area
Contains Semiconductor-specific information about the Device Profile.
Table 16: Semiconductor Device Profile Area Objects
Index Sub-
Index
Data Type Backup(B)/
Save(S)?
Access PDO
Assignable?
Name Description
0xF000 Semiconductor Device Profile
0x01 UINT RO Index Distance Index offset between PDO entries of two consecutive
modules (for ETG.5003 = 0x10), e.g. 0x7000, 0x7010
0x02 UINT RO Maximum Number of Modules
0xF010 Module Profile List Each sub-index lists the profile-number of the corresponding
module
Bit 15…0: 2080 Vacuum Pressure Gauge
Bit 31...16: 0x0000
0x01 UDINT RO 2080
0x02 UDINT RO 2080
14 Value Range Setting
Not used.