MKS 392 Series, User Instruction Manual

Page: 5 / 39

EtherCAT
®
Communication Protocol Manual
– p/n 20021549-001 Rev. B
5
1 Introduction
This document describes the physical interface, Device Profile, and Object Dictionary used for the
Series 392 Micro-Ion
®
ATM Vacuum Transducers.
It is assumed the reader has a general knowledge of EtherCAT and EtherCAT Masters. Refer to the
following EtherCAT specifications in addition to this manual:
•
ETG.1000 v1.0.4
•
ETG.1020 v1.2.0
•
ETG.1300 v1.1.1
•
ETG.2000 v1.0.0
•
ETG.2010 v1.0.0
•
ETG.5000.1 v0.9.0
•
ETG.5003.1 v1.1.0
•
ETG.5003.2 v1.0.0
•
ETG.5003.2080 v1.3.0
•
ETG.9001 v1.2.5
This document does not describe basic EtherCAT knowledge or the specific use of EtherCAT Masters.
2 Definitions
Table 1: Common Definitions
Term Definition
B/S Backup/Save
Backup/Save Backup/Save parameters are saved in NV memory
CG Combo-Gauge
CoE CAN Application Protocol over EtherCAT
CDP Common Device Profile
– ETG.5003
ESI Electronic Slave Information
– an XML file describing the device
ETG EtherCAT Technology Group
FoE File Access over EtherCAT
LSD Least Significant Digit
Master The EtherCAT Master
MSD Most Significant Digit
NV Non-Volatile
PDO Process Data Object
RO Read-Only
RW Read/Write
RX RxPDO
RxPDO Receive PDO (Master -> Slave)
SDO Service Data Object
SDP Specific Device Profile
– ETG.5003.2080
SI Sub-Index
SII Slave Information Interface
Slave The EtherCAT Slave
TX TxPDO
TxPDO Transmit PDO (Slave -> Master)
VG Vacuum Gauge