MKS 356 Micro-Ion Plus Series, Instruction Manual

Page: 14 / 76

Chapter 2
14
Micro-Ion
®
Module Instruction Manual - 356007-GP
Step 1
Install Pressure Relief Devices
Before you install the module, install appropriate pressure relief devices in
the vacuum system.
MKS Instruments, Inc./Granville-Phillips does not supply pressure relief
valves or rupture disks. Suppliers of pressure relief valves and pressure relief
disks can be located via an online search, and are listed on ThomasNet.com
under “Relief Valves” and “Rupture Discs.
Confirm that these safety
devices are properly installed before installing and operating the product.
Ensure the following precautions are complied with at all times:
(1) the proper gas cylinders are installed,
(2) the gas cylinder valve positions are correct on manual systems,
(3) and the automation is correct on automated gas delivery systems.
Step 2
Location of the Module
To determine the best location on the vacuum system for module, refer to
Figure 2-1 and Table 2-1, and the guidelines below.
• For proper operation of the module at atmosphere, orient the module
vertically (see Figure 2-1). Although the Micro-Ion gauge will read
correctly below 100 Torr with the module mounted in any position,
inaccurate readings will result at pressures above 100 Torr if the module
is not in the vertical position as illustrated in Figure 2-1.
• For greatest accuracy and repeatability, locate the module in a stable,
room-temperature environment. Ambient temperature should never
exceed 40 °C (104 °F) operating, non-condensing, or 85 °C (185 °F)
non-operating.
• Locate the module away from internal and external heat sources and in
an area where ambient temperature remains reasonably constant.
• Do not locate the module near the pump, where gauge pressure might be
lower than normal vacuum chamber pressure.
CAUTION
Operating the module above 1000 Torr (1333 mbar,
133 kPa) true pressure could cause vacuum system
rupture or product failure.
To avoid vacuum system rupture or product failure due to
overpressurization, install pressure relief valves or rupture
disks in the system if pressure exceeds 1000 Torr
(1333 mbar, 133 kPa).