MKS 356 Micro-Ion Plus Series, Instruction Manual

Page: 15 / 76

Installation
Micro-Ion
®
Module Instruction Manual - 356007-GP
15
In
stallation
O
per
a
tion
Maintenance
Before You
Begin
• Do not locate the module near a gas inlet or other source of
contamination, where inflow of gas or particulates causes atmospheric
pressure to be higher than system atmosphere.
• Do not locate the module where it will be exposed to corrosive gases
such as mercury vapor or fluorine.
Figure 2-1 Dimensions
9.8
(3.8)
7.4
(2.8)
9.2
(3.5)
Dim H.
Dimensions in
cm
(in.)