Operating Manual
Operation instructions
Page12-1
Chapter12
12
．
1 Summary
12
．
2 Working Principle
12
．
3 Important notes
12
．
4 Transferring Material into the Box
12
．
4
．
1 Preparation
12
．
4
．
2 Evacuate
12
．
4
．
3 Refill
12
．
4
．
4 Take material out of antechamber
12
．
5
Transferring Material out of the Box
12
．
5
．
1Preparation
12
．
5
．
2
Take material out of antechamber
12
．
6 Round Antechamber
12
．
6
．
1 Open/Close antechamber door
Diagram
Dia. 1
：
Working principle of antechamber
Dia. 2
：
Evacuate
Dia. 3
：
Refill
