Leica LMT260 XY, User Manual

Page: 37 / 42

Leica LMT260 XY Scanning Stage User Manual Specifications 37
Technical Data
Leica LMT260 XY scanning stage
Parameter Item Notes
Max. loading weight < 0.5 kg 1.0 kg 1.5 kg (max.)
Max. acceleration (X/Y) 1.0/2.0 m/s 2 1.0/2.0 m/s 2 0.1/0.1 m/s 2
Min. acceleration (X/Y) 1 μm/s 2
Max. travel speed 500 mm/s 500 mm/s 200 mm/s Limited by the possible acceleration and the
positioning range
Min. travel speed 100 mm/s
Travel range (X-axis x Y-axis) 120 x 80 mm
Positioning resolution 5 nm At 20 °C
Positioning accuracy
r
1.0 μm
r
2.0 μm
r
4.0 μm At 20 °C
Position repeatability
dr
0.25 μm
r
0.5 μm
r
1.0 μm At 20 °C
Peak force 10 N
Nominal force 8 N
Dimensions 374 x 247 x 31.1 mm Without connections
438 x 367 x 31.1 mm With connections
Operating voltage 100 to 240 V AC, 50/60 Hz Power supply voltage
Internal power supply 24 V DC
Weight approx. 4.8 kg
Operating temperature +10 to +40 °C