Appendix B
Kelvin (4W) S530 system diagnostics
In this section:
Introduction ................................................................ 3-1
Kelvin SMU diagnostic test flow ................................. 3-2
Kelvin SMU voltage and current test .......................... 3-3
Kelvin matrix diagnostic ............................................. 3-6
Kelvin basic short and continuity test ......................... 3-6
Kelvin short test........................................................ 3-10
Kelvin continuity test ................................................ 3-12
Kelvin leakage test ................................................... 3-16
Introduction
This section is intended to provide low-level details regarding how the various diagnostic tests run on
4 wire (4W) Kelvin S530 systems.
Kelvin hardware connection
In the Kelvin configuration, the system will have an even number of matrix cards. The matrix will be
separated to two independent parts: force and sense tests. The force test is connected to all the force
terminals, including instruments and the device under test (DUT) pins. The sense test is connected to
all the sense terminals.
NOTE
In a Kelvin S530 system, force and sense cards must be installed in pairs. Force cards must be
installed in slots 1, 2, or 3. Sense cards must be installed in slots 4, 5, or 6. For example, if there are
force cards in slots 1 and 2 of the 707 matrix mainframe, there must be corresponding sense cards in
slots 4 and 5.
Minimum hardware requirement
The minimum hardware requirement for diagnostics is two switch cards (one for force and one for
sense), and two SMUs (one for testing and one for support). The requirement is for three pins.
A Kelvin S530 system has one or more matrix cards for connections and the SMUs are connected to
rows and pins which are connected to columns.
