Appendix A: Non-Kelvin (2W) S530 system diagnostics
S530
Diagnostic Manual
Figure 33: Pin test
Leakage test connections
For example, if the current pin pair is pin 2 and pin 3 and the row pair is C and row D, the connections
during the test are indicated in the next Figure:
Figure 34: Test connections, pins 2 and 3, rows C and D
Leakage SMU Test
The SMU portion of the leakage test uses the first SMU of the Series 2600A instruments group that is
under test. The remaining SMUs will be looped to test with the first SMU. The path is made by
separately connecting two SMUs to group or rows without pin connection. Each group of rows
consists of row n and row n+1 (n = 1, 3, 5*). The test is executed by the same method of pin test and
the test result will be posted to both log and report.
Leakage SMU test Flow
If the Model 2410 SMU is tested, only use rows A and B.
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S530-906-01 Rev. A / March 2011
