tina83e1-d (2018-12)
17
Measurement range 0.667 … 10 V
(3M
A
x-xxx-xxx
Q
)
1E–01
1E+00
1E–06
1E–07
1E–08
1E–09
1E–10
0.0 0.5 1.0 1.5
2.5
3.5
4.5
5.5
6.5
7.5
8.5
9.5
10.5
2.0
3.0
4.0
5.0
6.0
7.0
8.0
9.0
10.0
Pressure p
Measurement signal U [V]
1E–02
1E–03
1E–04
1E–05
Pa
mbar
torr
0.667
s
en
s
or
er
ro
r
u
nd
er
ran
ge
ov
er
ran
ge
p = 10
(U-c)/1.33
⇔
U = c + 1.33 log p
valid in the range
1×10
-9
mbar < p < 1×10
-2
mbar
7.5×10
-10
Torr < p < 7.5 ×10
-3
Torr
1×10
-7
Pa < p < 1 Pa
mbar
Pa
Torr
c
12.66
10
12.826
where p pressure
U measurement signal
c constant (pressure unit dependent)
Summary of Contents for Gemini MAG500
Page 63: ...tina83e1 d 2018 12 63 Notes ...