Inficon Gemini MAG500, Operating Manual

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tina83e1-d (2018-12)
Contents
Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Scope of Delivery 5
1 Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2 Technical Data 10
2.1 Measuring Signal vs. Pressure 16
2.2 Gas Type Dependence MAG5xx 19
2.3 Gas Type Dependence MPG5xx 21
3 Installation 24
3.1 Vacuum Connection 24
3.2 Power Connection 28
3.2.1 FCC 68, 8-pin Connector 29
3.2.2 D-sub, 9-pin Connector 30
4 Operation 31
4.1 Status Indication MAG50x 31
4.2 Status Indication MPG50x 32
4.3 Put MAG5xx Into Operation 33
4.4 Put MPG5xx Into Operation 33
4.5 Gas Type Dependence 34
4.6 Ignition Delay 35
4.7 Contamination 35
5 Deinstallation 37
6 Maintenance, Repair 39
6.1 Adjusting the Gauge 39
6.2 Cleaning the Gauge / Replacing Parts 41
6.2.1 Troubleshooting (measuring chamber) 42
6.2.2 Replacing Ionization Chamber and Ignition Aid 44
6.2.3 Replacing Measuring Chamber 50
6.3 Troubleshooting 52