Inficon Gemini MAG500, Operating Manual

Page: 10 / 64

10
tina83e1-d (2018-12)
2 Technical Data
For further technical data for gauges with RS232C or
RS485C interface
→

[1], with EtherCAT interface
→

[2].
Measurement range (air, N
2
)
MAG
MPG
1×10
-9
… 1×10
-2
mbar
1×10
-9
… 1000 mbar
Accuracy MAG (N
2
)
1×10
-8
… 1×10
-2
mbar 30% of reading
Accuracy MPG (N
2
)
1×10
-8
… 100 mbar
100 … 1000 mbar
30% of reading
50% of reading
Repeatability (N
2
)
MAG, 1×10
-8
… 1×10
-2
mbar
MPG, 1×10
-8
… 100 mbar
5% of reading
5% of reading
Gas type dependence
MAG
MPG
→

19
→

21
Voltage range (analog output) 0 … +10.5 V
Measurement range
3MAx-xxx-xxx N
3MAx-xxx-xxx Q
3MBx-xxx-xxx P
+1.5 … +8.5 V (dc)
+0.667 … +10 V (dc)
+1.398 … +8.6 V (dc)
Voltage vs. pressure
3MAx-xxx-xxx N
3MAx-xxx-xxx Q
3MBx-xxx-xxx P
1 V/decade, logarithmic
1.33 V/decade, logarithmic
0.6 V/decade, logarithmic
Status signal 14.5 … 30 V (ignited)
Error signal
3MAx-xxx-xxx N
3MAx-xxx-xxx Q
3MBx-xxx-xxx P
<+0.5 V
≤+0.3 V
+9.5 … +10.5 V