Inficon Gemini MAG500 Operating Manual Download Page 13

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tina83e1-d (2018-12)

Grounding concept

→

"Power Connection"

Vacuum connection – signal
common

connected via 10 k

Ω

(potential difference

≤16 V)

Supply common – signal
common

conducted separately;
differential measurement is
recommended

Materials exposed to vacuum

Vacuum connection
Measuring chamber

stainless steel (1.4435)
stainless steel (1.4435)

Pirani filament (

MPG5xx)

Feedthrough,

MAG/MPG5x0

Isolation
Ring
Anode
Pin

glass, ceramic (Al

)

stainless steel (1.4435)
molybdenum
Ni alloy

Feedthrough,

MAG/MPG5x4

ceramic coated

Anode

molybdenum

Ionization chamber

3Mxx-

xx-xxxx

stainless steel

(1.4301, 1.4016)

3Mxx-

xx-xxxx

Ignition aid

stainless steel

(1.4310)

Internal volume

DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
DN 40 CF-R

≈

19.9 cm

≈

20.9 cm

≈

25.2 cm

≈

25.6 cm

Permissible pressure
(absolute)

10 bar, limited to inert gases
<55 °C

Bursting pressure (absolute)

>13 bar

Summary of Contents for Gemini MAG500

Page 1: ...tina83e1 d 2018 12 1 Cold Cathode Gauge Gemini MAG500 MAG504 Gemini MAG550 MAG554 Cold Cathode Pirani Gauge Gemini MPG500 MPG504 Gemini MPG550 MPG554 Operating Manual Incl EU Declaration of Conformity ...

Page 2: ...entification In all communications with INFICON please specify the infor mation given on the product nameplate For convenient refer ence copy that information into the space provided below Model PN SN VDC W INFICON AG LI 9496 Balzers ...

Page 3: ...tina83e1 d 2018 12 3 Validity This document applies to products of the MAG5xx and MPG5xx series EtherCAT RS232 485 The part number PN can be taken from the product nameplate ...

Page 4: ...be operated in connection with an INFICON Vacuum Gauge Controller of the VGC40x VGC50x series Gemini MPG500 MPG504 MPG550 MPG554 The Cold Cathode Gauges Gemini MPG5xx have been designed for vacuum measurement of gases in the pressure range of 1 10 9 1000 mbar They must not be used for measuring flammable or combustible gases in mixtures containing oxidants e g atmospheric oxygen within the explosi...

Page 5: ... the Pirani and the cold cathode system according to the inverted magnetron principle They are combined in such a way that for the user they behave like one measuring system Over the whole measurement range the measuring signal is output as a logarithm of the pressure Scope of Delivery 1 gauge 1 pin for adjusting settings via buttons MPG gauges only 1 Operating Manual German 1 Operating Manual Eng...

Page 6: ... Vacuum Connection 24 3 2 Power Connection 28 3 2 1 FCC 68 8 pin Connector 29 3 2 2 D sub 9 pin Connector 30 4 Operation 31 4 1 Status Indication MAG50x 31 4 2 Status Indication MPG50x 32 4 3 Put MAG5xx Into Operation 33 4 4 Put MPG5xx Into Operation 33 4 5 Gas Type Dependence 34 4 6 Ignition Delay 35 4 7 Contamination 35 5 Deinstallation 37 6 Maintenance Repair 39 6 1 Adjusting the Gauge 39 6 2 C...

Page 7: ...ring Chamber Cpl Spare Sensor 58 11 3 1 Measuring Chamber Cpl for MAG5x0 58 11 3 2 Measuring Chamber Cpl for MAG5x4 59 11 3 3 Measuring Chamber Cpl for MPG5x0 59 11 3 4 Measuring Chamber Cpl for MPG5x4 60 Literature 61 ETL Certification 61 EU Declaration of Conformity 62 For cross references within this document the symbol XY is used for cross references to further documents listed under literatur...

Page 8: ... handling or use Disregard can lead to malfunctions or minor equipment damage Symbol printed on the product nameplate Consultation of operating manual required Notice Labeling 1 2 Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the neces sary experience or who have been instructed by the end ...

Page 9: ...nated Adhere to the relevant regulations and take the necessary precautions when handling contamin ated parts Communicate the safety instructions to all other users 1 4 Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind of inte...

Page 10: ...0 of reading Repeatability N2 MAG 1 10 8 1 10 2 mbar MPG 1 10 8 100 mbar 5 of reading 5 of reading Gas type dependence MAG MPG 19 21 Voltage range analog output 0 10 5 V Measurement range 3MAx xxx xxxN 3MAx xxx xxxQ 3MBx xxx xxxP 1 5 8 5 V dc 0 667 10 V dc 1 398 8 6 V dc Voltage vs pressure 3MAx xxx xxxN 3MAx xxx xxxQ 3MBx xxx xxxP 1 V decade logarithmic 1 33 V decade logarithmic 0 6 V decade loga...

Page 11: ...Status signal digital output FCC receptacle Current rating 100 mA High voltage is ON 14 5 30 V dc depending on supply voltage High voltage is OFF 0 V dc D sub receptacle Supply voltage 30 V dc Current rating 100 mA sink High voltage is ON 0 V dc High voltage is OFF open High voltage cut in low active digital input High voltage ON High voltage OFF 2 5 V dc 4 0 V dc High voltage cut in high active d...

Page 12: ...x 2 W Fuse to be connected 2 1 AT High voltage in the measuring chamber Ignition voltage Operating voltage 4 5 kV 3 3 kV Current in the measuring chamber 3Mxx x0x xxxx 3Mxx x1x xxxx high current low current Electrical connection 3Mxx xxx 00xx 3Mxx xxx 01xx 1 FCC 68 8 pin D sub 9 pin Sensor cable FCC connector D sub connector 8 pin shielded 9 pin shielded Cable length FCC only 50 m 0 14 mm2 conduct...

Page 13: ... steel 1 4435 Pirani filament MPG5xx W Feedthrough MAG MPG5x0 Isolation Ring Anode Pin glass ceramic Al2O3 stainless steel 1 4435 molybdenum Ni alloy Feedthrough MAG MPG5x4 ceramic coated Anode molybdenum Ionization chamber 3Mxx 0xx xxxx stainless steel 1 4301 1 4016 3Mxx 1xx xxxx Ti Ignition aid stainless steel 1 4310 Internal volume DN 25 ISO KF DN 40 ISO KF DN 40 CF F DN 40 CF R 19 9 cm3 20 9 c...

Page 14: ...1 10 8 1 10 2 mbar 1 10 7 1 10 2 mbar 70 non condensing 95 non condensing Mounting orientation any Use indoors only altitude up to 6000 m NN Degree of protection IP 40 Weight Without fieldbus interface DN 25 ISO KF DN 40 ISO KF DN 40 CF F und CF R 280 g 320 g 570 g With fieldbus interface DN 25 ISO KF DN 40 ISO KF DN 40 CF F und CF R 500 g 530 g 780 g 4 Without electronics unit ...

Page 15: ...15 Dimensions MxG50x mm DN 25 ISO KF 15 79 60 DN 40 CF R 23 DN 40 CF F 23 DN 40 ISO KF 17 DIA ADJ CAL HV ST ST E C A 0 2 4 6 8 FCC 68 8 pin 44 44 DIA ADJ CAL HV ST ST E C A 0 2 4 6 8 D Sub 9 pin 44 44 Dimensions MxG55x 2 ...

Page 16: ... 5 7 5 8 5 9 5 2 0 3 0 4 0 5 0 6 0 7 0 8 0 9 0 10 0 sensor error Pressure p Measurement signal U V 1E 02 1E 03 1E 04 1E 05 underrange Pa mbar torr overrange p 10 U c U c log10 p valid in the range 1 10 9 mbar p 1 10 2 mbar 7 5 10 10 Torr p 7 5 10 3 Torr 1 10 7 Pa p 1 Pa mbar Pa Torr c 10 5 8 5 10 625 where p pressure U measurement signal c constant pressure unit dependent ...

Page 17: ...0 4 0 5 0 6 0 7 0 8 0 9 0 10 0 Pressure p Measurement signal U V 1E 02 1E 03 1E 04 1E 05 Pa mbar torr 0 667 sensor error underrange overrange p 10 U c 1 33 U c 1 33 log p valid in the range 1 10 9 mbar p 1 10 2 mbar 7 5 10 10 Torr p 7 5 10 3 Torr 1 10 7 Pa p 1 Pa mbar Pa Torr c 12 66 10 12 826 where p pressure U measurement signal c constant pressure unit dependent ...

Page 18: ...0 5 Measurement signal U V Pressure p 8 6 1 397 1E 09 sensor error Pa mbar torr 1 217 underrange overrange p 101 667U d U c 0 6 log p valid in the range 1 10 9 mbar p 1000 mbar 7 5 10 10 Torr p 750 Torr 1 10 7 Pa p 1 105 Pa mbar Pa Torr c 6 798 5 598 6 873 d 11 33 9 333 11 46 where p pressure U measurement signal c d constant pressure unit dependent ...

Page 19: ...2 10 6 8 6 4 2 10 7 10 7 2 4 6 10 6 2 4 6 10 5 2 4 6 10 4 2 4 6 10 3 2 4 6 10 2 Xe Kr Air O2 CO N2 H2Ne He peff mbar p mbar Ar Indication range below 10 5 mbar In the range below 10 5 the pressure indication is linear For gases other than air the pressure can be determined by means of a simple conversion formula peff K indicated pressure ...

Page 20: ...4 Kr 0 5 Ar 0 8 H2 2 4 Ne 4 1 He 5 9 These conversion factors are average values A mixture of gases and vapors is often involved In this case accurate determination is only possible with a partial pressure measurement instrument e g a quadrupole mass spectrometer ...

Page 21: ...irani only operation Indicated pressure gauge calibrated for air p mbar peff mbar 102 8 6 4 2 101 8 6 4 2 100 8 6 4 2 10 1 8 6 4 2 10 2 H2 He Ne Air N2 O2 CO 10 3 2 4 6 10 2 10 1 100 101 102 8 2 4 6 8 2 4 6 8 2 4 6 8 2 4 6 8 Water vapor Indication range above 10 2 mbar Xe Kr Ar CO2 Freon 12 ...

Page 22: ...4 2 10 6 8 2 4 6 8 2 4 6 2 4 6 2 4 6 10 3 8 10 2 8 10 1 8 10 3 8 10 2 8 10 1 8 peff mbar p mbar Indication range 10 6 10 1 mbar Air N2 O2 CO Ar He Indication range below 10 5 mbar In the range below 10 5 the pressure indication is linear For gases other than air the pressure can be determined by means of a simple conversion formula peff K indicated pressure ...

Page 23: ...4 Kr 0 5 Ar 0 8 H2 2 4 Ne 4 1 He 5 9 These conversion factors are average values A mixture of gases and vapors is often involved In this case accurate determination is only possible with a partial pressure measurement instrument e g a quadrupole mass spectrometer ...

Page 24: ...opened while the vacuum system is pressurized Do not open any clamps while the vacuum system is pressurized Use the type clamps which are suited to overpressure DANGER Overpressure in the vacuum system 2 5 bar KF flange connections with elastomer seals e g O rings cannot withstand such pressures Process media can thus leak and possibly damage your health Use O rings provided with an outer centerin...

Page 25: ...to EN 61010 CF connections fulfill this requirement For gauges with a KF flange use a conductive metallic clamping ring Caution Vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Dirt sensitive area Touching the product or parts thereof with bare hands increases ...

Page 26: ...uring chamber preferably choose a horizontal to upright position For potentially contaminating applications and to protect the measurement system against contamination installation of the optional seal with centering ring and filter is recommended Options 57 Remove the protective lid and connect the product to the vacuum system or Protective lid Seal with centering ring and filter Clamp Seal with ...

Page 27: ...tina83e1 d 2018 12 27 When making a CF flange connection it may be ad vantageous to temporarily remove the electronics unit Hexagon socket AF 2 Protective lid Keep the protective lid ...

Page 28: ...o be fused 5 Ground loops differences of potential or EMC problems may affect the measurement signal For optimum signal quality please do observe the following notes Use an overall metal braided shielded cable The connector must have a metal case Connect the supply common with protective ground directly at the power Use differential measurement input signal common and supply common conducted separ...

Page 29: ...Ident Signal 7 8 High active Low active HV on HV on Electrical connection Pin 1 Supply 14 5 30 V dc Pin 2 Supply common GND Pin 3 Signal output measuring signal Pin 4 Gauge identification Pin 5 Signal common Pin 6 Status signal Pin 7 High voltage on off low active Pin 8 High voltage on off high active MAG only Pin 7 and 8 are not assigned in the MPG gauge 1 8 FCC 68 8 pin ...

Page 30: ...or cable Electrical connection Pin 1 High voltage on off low active Pin 2 Supply common GND Pin 3 Signal output measuring signal Pin 4 Supply 14 5 30 V dc Pin 5 not assigned Pin 6 do not connect Pin 7 Signal common Pin 8 not assigned Pin 9 Status signal MAG only Pin 1 is not assigned in the MPG gauge 1 5 6 9 D sub 9 pin female soldering side ...

Page 31: ...ion value LED Meaning ST HV ST off off No supply voltage lit solid green off Supply voltage ok no high voltage in the measuring chamber lit solid green blinking green Supply voltage ok pressure in the cold cathode range cold cathode has not ignited lit solid green lit solid green Cold cathode has ignited blinking red off EEPROM error Troubleshooting 53 Status indication MAG55x 2 ...

Page 32: ... off No supply voltage lit solid green off Supply voltage ok Pirani active no high voltage in the measuring chamber lit solid green blinking green Supply voltage ok pressure in the cold cathode range cold cathode has not ignited lit solid green lit solid green Cold cathode has ignited lit solid red off Measurement system error blinking red off EEPROM error Troubleshooting 54 Status indication MPG5...

Page 33: ...s switched on via pin 7 low active or pin 8 high active the measuring signal is available at the signal output MAG5xx with D sub connector When the supply voltage is applied and the high voltage is switched on via pin 1 D sub 9 pin low active or via pin 8 D sub HD 15 pin low active the measuring signal is available at the signal output 4 4 Put MPG5xx Into Operation When the supply voltage is appli...

Page 34: ...old cathode Pirani The Pirani measuring circuit is always on The cold cathode measuring circuit is controlled by the Pirani circuit and is activated only at pressures p 1 10 2 mbar As long as the cold cathode measuring circuit has not ignited the measuring value of the Pirani is output as measuring signal 4 5 Gas Type Dependence The measurement value is gas dependent The pressure reading applies t...

Page 35: ...t has not ignited the measuring value of the Pirani is output as measuring signal The status output 0 V indicates the Pirani only operation If the high voltage is activated at a pressure p 3 10 9 the gauge cannot recognize whether the cold cathode system has ignited Once flanged on permanently leave the gauge in the operating mode irrespective of the pressure range Like this the ignition delay of ...

Page 36: ...n is usually too low as a consequence of the contami nation of the cold cathode system In case of severe contami nation instabilities can occur layers of the measuring cham ber peel off Contamination due to isolating layers can even lead to a complete failure of the discharge Contamination can to a certain extent be reduced by geometric protection e g screenings elbows against parti cles that spre...

Page 37: ...ontaminated parts Caution Vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools when working in this area V...

Page 38: ...emove gauge from the vacuum system and install the protective lid When deinstalling the CF flange connection it may be advantageous to temporarily remove the elec tronics unit 27 Protective lid Clamp Seal with centering ring ...

Page 39: ...r cpl spare sensor MPG5xx The cold cathode measuring circuit which is dominant for low pressures 1 10 3 mbar is factory calibrated and cannot be adjusted The HV adjustment of the Pirani measuring circuit is carried out automatically by the gauge itself at pressures 1 10 5 mbar The new zero point is saved non volatile every 15 minutes Any adjustment has a negligible effect on the pres sure range be...

Page 40: ...therCAT interface 2 If you are using a seal with centering ring and filter check that they are clean or replace them if necessary Deinstallation Put the gauge into operation and operate it at atmospheric pressure for at least 10 minutes Briefly press the ADJ button with a pin max ø1 1 mm and the ATM adjustment is carried out or ATM HV perform the adjustment via the diagnostic port or via the Ether...

Page 41: ...ar is output at the measurement value output the adjustment has been successful Otherwise repeat the adjustment proce dure 6 2 Cleaning the Gauge Replacing Parts In case of severe contamination or defective e g pirani filament rupture MPG5xx replace the complete measuring chamber Spare Parts 57 DANGER Contaminated parts Contaminated parts can be detrimental to health and environment Before beginni...

Page 42: ...ays wear clean lint free gloves and use clean tools when working in this area DANGER Cleaning agents Cleaning agents can be detrimental to health and environment Adhere to the relevant regulations and take the necessary precautions when handling and disposing of cleaning agents Consider possible reactions with the product materials 13 Precondition Gauge deinstalled 6 2 1 Troubleshooting measuring ...

Page 43: ...lete measuring chamber 3 from the electronics unit 5 Remove the retaining ring 1 as well as the ionization chamber 2 from the measuring chamber 3 Check the ionization chamber and the measuring chamber for contamination Ionization chamber is contaminated only Replace ionization chamber 44 Measuring chamber is severely contaminated Replace complete measuring chamber 50 ...

Page 44: ...at 20 C Values outside of the range Pirani tempera ture sensor rupture 5 measuring chamber Contamination short circuit cold cathode 1 2 3 4 5 Measuring chamber All of theses faults can only be remedied by replacing the complete measuring chamber 50 We recommend to perform a leak test leak rate 1 10 9 mbar l s 6 2 2 Replacing Ionization Chamber and Ignition Aid Precondition Troubleshooting measurin...

Page 45: ...tina83e1 d 2018 12 45 Due to contamination remove the ignition aid with the removing tool Accessories 57 Insert e g a Scotch Brite into the mounting tool ...

Page 46: ...46 tina83e1 d 2018 12 and carefully rub the anode to a bright finish Do not bend the anode Insert e g a Scotch Brite into the mounting tool ...

Page 47: ... the anode We recommend to rub the inside walls of the measuring chamber up to the groove for the retaining ring to a bright finish using a polishing cloth The sealing surfaces must only be worked concentrically Do not bend the anode Rinse the measuring chamber with alcohol and allow it to dry ...

Page 48: ...48 tina83e1 d 2018 12 Insert the new ignition aid into the mounting tool with the flat side upwards and carefully slide it onto the anode until the stop position is reached ...

Page 49: ... chamber 2 into the measuring chamber 3 until the mechanical stop is reached and mount the retaining ring 1 Spare Parts 57 3 2 1 Observe correct orientation of the ionization chamber We recommend to perform a leak test leak rate 1 10 9 mbar l s Carefully slide the measuring chamber cpl 3 clean or new into the electronics unit 5 until the mechanical stop is reached Pins aligned straight ...

Page 50: ...3 Replacing Measuring Chamber Precondition Troubleshooting measuring chamber performed 42 Set the calibration value of the spare sensor with the CAL switch on the electronics unit 5 DIA ADJ CAL HV ST ST E C A 0 2 4 6 8 E C A 0 2 4 6 8 Calibration value spare sensor measuring chamber cpl 8 5 ...

Page 51: ...until the mechanical stop is reached Pins aligned straight 3 5 4 Fasten the measuring chamber 3 by means of the hexagon socket set screw 4 MPG5xx gauge only Perform an ATM and HV adjustment of the Pirani measuring circuit via the ADJ button 40 A recalibration of the MAG5xx gauge is not necessary ...

Page 52: ...52 tina83e1 d 2018 12 6 3 Troubleshooting In case of an error it may be helpful to just turn off the mains supply and turn it on again after 5 s ...

Page 53: ...uge contaminated No high voltage in the measuring chamber Overpressure in the measuring chamber Gas discharge has not ignited EEPROM error Measuring chamber severely contaminated Status signal 0 0 0 0 0 14 5 30 V LED HV ST off lid solid green off blinking green off lid solid green LED ST off lid solid green lid solid green lid solid green blinking red lid solid green Problem No voltage at signal o...

Page 54: ...ge Gauge contaminated Gas discharge has not ignited Pirani zero point shift Pirani defective EEPROM error Measuring chamber severely contaminated Status signal 0 0 0 0 0 0 14 5 30 V LED HV ST off lid solid green blinking green off off off lid solid green LED ST off lid solid green lid solid green lid solid green lid solid red blinking red lid solid green Problem No voltage at signal output Measuri...

Page 55: ...ferably be free of harmful substances Adhere to the forward ing regulations of all involved countries and for warding companies and enclose a duly completed declaration of contamination Form under www inficon com Products that are not clearly declared as free of harmful sub stances are decontaminated at the expense of the customer Products not accompanied by a duly completed declaration of contami...

Page 56: ...ic components operating fluids etc can be detrimen tal to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its components ac cording to the following criteria Contaminated components Contaminated components radioactive toxic caustic or bio logical hazard etc must be decontaminated in acco...

Page 57: ...ffle optical tight with centering ring and seal DN 25 ISO KF 211 113 Baffle DN 25 ISO KF DN 40 ISO KF DN 40 CF x 353 512 10 Accessories Ordering No Mounting removing tool for ignition aid 351 550 11 Spare Parts When ordering spare parts always indicate all information on the product nameplate description and ordering number ...

Page 58: ... stainless steel 351 555 Ionization chamber Titanium 351 556 11 3 Measuring Chamber Cpl Spare Sensor Ionization chamber Retaining ring Measuring chamber 11 3 1 Measuring Chamber Cpl for MAG5x0 Ionization chamber made of stainless steel Ordering No MAG5x0 3MA0 006 xxxx DN 25 ISO KF 351 500 3MA0 007 xxxx DN 40 ISO KF 351 512 3MA0 008 xxxx DN 40 CF R 351 536 3MA0 00Q xxxx DN 40 CF F 351 524 ...

Page 59: ...KF 351 501 3MA3 007 xxxx DN 40 ISO KF 351 513 3MA3 008 xxxx DN 40 CF R 351 537 3MA3 00Q xxxx DN 40 CF F 351 525 Ionization chamber made of Titanium Al2O3 coated Ordering No MAG5x4 3MA3 116 xxxx DN 25 ISO KF 351 503 3MA3 117 xxxx DN 40 ISO KF 351 515 3MA3 118 xxxx DN 40 CF R 351 539 3MA3 11Q xxxx DN 40 CF F 351 527 11 3 3 Measuring Chamber Cpl for MPG5x0 Ionization chamber made of stainless steel O...

Page 60: ...amber Cpl for MPG5x4 Ionization chamber made of stainless steel Al2O3 coated Ordering No MPG5x4 3MB3 006 xxxx DN 25 ISO KF 351 507 3MB3 007 xxxx DN 40 ISO KF 351 519 3MB3 008 xxxx DN 40 CF R 351 543 3MB3 00Q xxxx DN 40 CF F 351 531 Ionization chamber made of Titanum Al2O3 coated Ordering No MPG5x4 3MB3 116 xxxx DN 25 ISO KF 351 509 3MB3 117 xxxx DN 40 ISO KF 351 521 3MB3 118 xxxx DN 40 CF R 351 54...

Page 61: ...ficon com Communication Protocol EtherCAT MAG550 MAG554 MPG550 MPG554 tirb38e1 English only INFICON AG LI 9496 Balzers Liechtenstein ETL Certification RECOGNIZED COMPONENT 3103457 ETL LISTED The products MAG500 MAG504 MAG550 MAG554 MPG500 MPG504 MPG550 and MPG554 with FCC and D sub connector conform to the UL Standard UL 61010 1 are certified to the CAN CSA Standard C22 2 No 61010 1 12 ...

Page 62: ...auge Gemini MAG500 MAG504 MAG550 MAG554 Gemini MPG500 MPG504 MPG550 MPG554 Standards Harmonized and international national standards and specifi cations EN 61000 6 2 2005 EMC generic immunity standard EN 61000 6 3 2007 A1 2011 EMC generic emission standard EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and laboratory use EN 61326 1 2013 Group 1 Class B EMC req...

Page 63: ...tina83e1 d 2018 12 63 Notes ...

Page 64: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 Original German tina83d1 d 2018 12 reachus inficon com t i na83e1 d www inficon com ...

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