1. INTRODUCTION
Page 21
© 1995 - 2010 Fluke Corporation, DH Instruments Division
Table 21: CO.
molbloc-S Flow in Carbon Monoxide at Various molbloc Upstream Pressures
Carbon Monoxide
Ratio = 1.000
CO
molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]
DESIGNATOR
K
F
[sccm/ kPa]
20 kPa
(3 psia)
50 kPa
(7 psia)
100 kPa
(15 psia)
Minimum
witout
vacuum
(3)
200 kPa
(30 psia)
500 kPa
(70 psia)
700 kPa
(100 psia)
1.2 MPa
(174 psia)
2 MPa
(290 psia)
1E1-S
10
0.2
0.5
1.0
2.0
2.0
5.0
7.0
12.0
20.0
2E1-S
20
0.4
1.0
2.0
3.5
4.0
10.0
14.0
24.0
40.0
5E1-S
50
1.0
2.5
5.0
7.7
10.0
25.0
35.0
60.0
100.0
1E2-S
100
2.0
5.0
10.0
15.4
20.0
50.0
70.0
120.0
200.0
2E2-S
200
4.0
10.0
20.0
27.8
40.0
100.0
140.0
240.0
400.0
5E2-S
500
10.0
25.0
50.0
68.3
100.0
250.0
350.0
600.0
1,000.0
1E3-S
1,000
20.0
50.0
100.0
128.7
200.0
500.0
700.0
1,200.0
1,999.9
2E3-S
2,000
40.0
100.0
200.0
247.9
400.0
1,000.0
1,399.9
2,399.9
3,999.9
5E3-S
5,000
100.0
250.0
500.0
595.0
1,000.0
2,499.9
3,499.9
5,999.8
9,999.6
1E4-S
10,000
200.0
500.0
1,000.0
1,190.0
1,999.9
4,999.8
6,999.7
11,999.6
19,999.3
[1] Flow values in table are valid only when critical flow is established.
[2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values
will generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7%
higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to
flowpath machining tolerances.
[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)
downstream of molbloc-S (no vacuum).
Table 22: N2O.
molbloc-S Flow in Nitrous Oxide at Various molbloc Upstream Pressures
Nitrous Oxide
Ratio = 0.795
N20
molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]
DESIGNATOR
K
F
[sccm/ kPa]
20 kPa
(3 psia)
50 kPa
(7 psia)
100 kPa
(15 psia)
Minimum
witout
vacuum
(3)
200 kPa
(30 psia)
500 kPa
(70 psia)
700 kPa
(100 psia)
1.2 MPa
(174 psia)
2 MPa
(290 psia)
1E1-S
10
0.2
0.4
0.8
1.4
1.6
4.0
5.6
n/a
[4]
n/a
[4]
2E1-S
20
0.3
0.8
1.6
2.5
3.2
8.0
11.1
n/a
[4]
n/a
[4]
5E1-S
50
0.8
2.0
4.0
6.2
8.0
19.9
27.8
n/a
[4]
n/a
[4]
1E2-S
100
1.6
4.0
8.0
11.1
15.9
39.8
55.7
n/a
[4]
n/a
[4]
2E2-S
200
3.2
8.0
15.9
22.1
31.8
79.5
111.3
n/a
[4]
n/a
[4]
5E2-S
500
8.0
19.9
39.8
51.2
79.5
198.8
278.3
n/a
[4]
n/a
[4]
1E3-S
1,000
15.9
39.8
79.5
102.4
159.0
397.6
556.6
n/a
[4]
n/a
[4]
2E3-S
2,000
31.8
79.5
159.0
189.3
318.0
795.1
1,113.2
n/a
[4]
n/a
[4]
5E3-S
5,000
79.5
198.8
397.6
473.1
795.1
1,987.8
2,782.9
n/a
[4]
n/a
[4]
1E4-S
10,000
159.0
397.6
795.1
913.7
1,590.2
3,975.6
5,565.8
n/a
[4]
n/a
[4]
[1] Flow values in table are valid only when critical flow is established.
[2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values
will generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7%
higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to
flowpath machining tolerances.
[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)
downstream of molbloc-S (no vacuum).
[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.
