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INP-TN512878-E
5.2.2 Variable gain by primary PID block and secondary PID block
Figure 5-7
This is the method to change the PID gain by a changeover signal, with PID constant set in both of
primary PID wafer and secondary PID wafer (42), in case primary PID Control sequence is not used.
5.2.3 Deviation square type PID control
Figure 5-8
Deviation square type PID is to execute control in proportion to the square of the deviation. It is
used for PH control or the like in general, and is largely different from ordinary PID control.
Figure 5-9
Summary of Contents for CC-M
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