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INP-TN512878-E
5.4.2 Intermittent PID control (sample value type PID control)
This is such a control that PID control is executed in a certain period and the lag component of the
dead time of the process is treated in the output hold status in the next period. It is more effective
than sampling control for a process of relatively large noise.
With CC-M, this control can be materialized by the combination of a changeover wafer and a pulse
generation wafer. PID is executed during the ON time of the pulse generation wafer and
intermittent PID control is executed in the hold status during the OFF time. As the wafer
connection, an intermittent circuit is inserted between wafers 42 and 43 as indicated below.
Figure 5-14
Summary of Contents for CC-M
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