4
WAFERGARD® III NF-750 IN-LINE GAS FILTERS MANUAL P74590 REV. B
ENTEGRIS, INC.
WAFERGARD® III NF-750 IN-LINE GAS FILTERS INSTALLATION AND USE MANUAL
127.0 mm (5.0
″
)
∅
61.0 mm
(2.40
″
)
1
⁄
4
″
Fitting
127.0 mm (5.0
″
)
∅
61.0 mm
(2.40
″
)
1
⁄
2
″
Fitting
Dimensions
Ordering Information
Performance Data
D
if
fe
re
n
ti
a
l
P
re
ss
u
re
(b
a
r)
D
if
fe
re
n
ti
a
l
P
re
ss
u
re
(P
S
IG
)
Nitrogen Flow Rate @ 23°C SLPM
0
200
400
600
800
1000
60
48
36
24
12
0
5.6
4.8
4.0
3.2
2.4
1.6
0.8
0
2.06 bar inlet (30 PSIG)
6.2 bar inlet (90 PSIG)
4.12 bar inlet (60 PSIG)
D
if
fe
re
n
ti
a
l
P
re
ss
u
re
(b
a
r)
D
if
fe
re
n
ti
a
l
P
re
ss
u
re
(P
S
IG
)
Nitrogen Flow Rate @ 23°C SLPM
0
200
400
600
800
1000
15
12
9
6
3
0
1.4
1.2
1.0
0.8
0.6
0.4
0.2
0
Part Number
Overall Length
Fitting Options
WG3N S7 RR2
127 mm (5.00
″
)
1
⁄
4
″
Gasket seal (compatible with VCR® fitting) male inlet/outlet
WG3N S7 RR4
127 mm (5.00
″
)
1
⁄
2
″
Gasket seal (compatible with VCR® fitting) male inlet/outlet
1
⁄
4
″
Fitting
1
⁄
2
″
Fitting
