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ENTEGRIS, INC.

WAFERGARD® III NF-750 IN-LINE GAS FILTERS MANUAL  P74590 REV. B

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WAFERGARD® III NF-750 IN-LINE GAS FILTERS INSTALLATION AND USE MANUAL

Entegris Standard Warranties

GENERAL LIMITED WARRANTY FOR NON-CUSTOM ENTEGRIS PRODUCTS

Subject to the limitations and disclaimers set forth below, Entegris, Inc. (“Entegris”) warrants that for the Applicable Warranty Period (as defined in the section entitled
“Applicable Warranty Period” below) following the date of shipment, the products manufactured by it shall be free of defects in materials and workmanship when
installed, used, serviced and operated in accordance with the applicable product documentation. The Applicable Warranty Period does not apply to any lifetime perform-
ance. In the event that a product failure is caused by a defect in materials or workmanship within the Applicable Warranty Period, Entegris agrees to repair or replace,
at its option and at no charge to the purchaser, any product or part thereof that proves to have such a defect, provided that prompt written notice of any such defect 
is given to Entegris. Entegris’ agreement to repair or replace any product found to be defective in materials or workmanship is the exclusive remedy provided herein; 
this remedy shall not be deemed to have failed of its essential purpose so long as Entegris is willing and able to repair or replace any such defective Entegris product 
or part or to refund the purchase price paid.

Limitations

The warranty set forth above is LIMITED and does not cover: 

(A) 

products with the identification label or serial number altered or removed; 

(B) 

products which have been

repaired, or tampered with or serviced by any person other than an authorized Entegris service representative; 

(C)

products which have been subjected to misuse, neglect

or abuse (including, without limitation, exposure to overpressure, use with excessive voltage or inappropriate power source or exposure to hostile operating conditions
unless the product has been expressly specified by Entegris for use therein). In the case of Entegris products which are systems that include components manufactured by
companies other than Entegris or its affiliates, the foregoing warranty shall apply only to those components and subassemblies manufactured by Entegris or its affiliates;
the non-Entegris components and subassemblies included in such systems are covered by the warranty, if any, extended by the manufacturer thereof. Entegris hereby
assigns any such warranty to the system purchaser. 

Disclaimers

ENTEGRIS MAKES NO OTHER WARRANTY, EXPRESSED OR IMPLIED. THERE IS NO WARRANTY OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR 
PURPOSE. THE APPLICABLE WARRANTY PERIOD IS NOT A LIFETIME PERFORMANCE WARRANTY.

The warranty provided herein and the data, specifications and

descriptions of Entegris products appearing in Entegris’ published catalogs and product literature may not be altered except by express written agreement signed by an
officer of Entegris. Representations, oral or written, which are inconsistent with this general limited warranty or any such publications are not authorized and if given,
should not be relied upon. Notwithstanding the failure of any remedy provided herein, 

in no event shall Entegris be liable for consequential, incidental, special or 

any other indirect damages resulting from economic loss or property damage sustained by any customer from the use of Entegris products.

In the event of a breach of the foregoing warranty, Entegris’ sole obligation shall be to repair or replace, at its option, any product or part thereof that proves defective 
in materials or workmanship within the warranty period, provided the customer notifies Entegris promptly of any such defect. The exclusive remedy provided herein
shall not be deemed to have failed of its essential purpose so long as Entegris is willing and able to repair or replace any nonconforming Entegris product or part or 
to refund the purchase price paid.

Applicable Warranty Period

As used in this General Limited Warranty the term Applicable Warranty Period for the indicated product groups are as follows: 

Entegris Products

Warranty Period

Entegris 
Product Codes

Non-dispense electro-
mechanical products

1 year from date of shipment

Integrated shipping systems 
products

30 days from date 
of shipment

Wafer handling, electronic 
packaging products and 
cleaning systems

90 days from date 
of shipment

Liquid fittings, containers 
and housings

1 year from date of shipment

Exceptions: 

Sheetlined 

chemical container products 
and FluoroPure® PFA Liners 
(blistering, cracking or 
leakage only)

18 months from date 
of shipment

Exceptions: 

FluoroPure® 

o-rings and gasket materials

90 days from date 
of shipment

Software Products

1 year from date of shipment 

Other Products

1 year from date of shipment

Entegris Products

Warranty Period

Entegris 
Product Codes

Polymeric membrane products

1 year from date of shipment 

H4, H5, M4, M6

Exceptions: 

Does not apply 

to membrane-based purifiers

Metal membrane products

2 years from date of shipment I2

Exceptions: 

Nickel 

membrane gas filtration 
products

5 years or 100,000 cycles
(whichever comes first) 
from date of shipment

I2

Exceptions: 

Nickel 

membrane gas diffuser 
products

5 years or 100,000 cycles
(whichever comes first) 
from date of shipment

I5

Polymeric membrane-based 
purifiers / Other liquid purifiers /
Gas purifiers / Chemical filters

1 year from date of shipment

I7, I8, F1, 
F2, F4

Dispense products and liquid 
subsystems

1 year from date of shipment

H6

Exceptions: 

Products and 

subsystems purchased by
Original Equipment
Manufacturers (OEM)

18 months from date 
of shipment

H6

CUSTOM ORDER LIMITED WARRANTY FOR ENTEGRIS PRODUCTS

Entegris, Inc. warrants Custom Order products against defects in materials and workmanship for a period of thirty (30) days following receipt by the purchaser. Entegris’
sole obligation shall be to repair or replace, at its option, any Custom Order product that proves to be defective in materials or workmanship within the warranty period.

Disclaimers

ENTEGRIS MAKES NO OTHER WARRANTY, EXPRESSED OR IMPLIED. THERE IS NO WARRANTY OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR 
PURPOSE. THE APPLICABLE WARRANTY PERIOD IS NOT A LIFETIME PERFORMANCE WARRANTY.

The warranty provided herein and the data, specifications and

descriptions of Entegris products appearing in Entegris’ published catalogs and product literature may not be altered except by express written agreement signed by an
officer of Entegris. Representations, oral or written, which are inconsistent with this general limited warranty or any such publications are not authorized and if given,
should not be relied upon. Notwithstanding the failure of any remedy provided herein, 

in no event shall Entegris be liable for consequential, incidental, special or 

any other indirect damages resulting from economic loss or property damage sustained by any customer from the use of Entegris products.

In the event of a breach of the foregoing warranty, Entegris’ sole obligation shall be to repair or replace, at its option, any product or part thereof that proves defective 
in materials or workmanship within the warranty period, provided the customer notifies Entegris promptly of any such defect. The exclusive remedy provided herein shall 
not be deemed to have failed of its essential purpose so long as Entegris is willing and able to repair or replace any nonconforming Entegris product or part or to refund
the purchase price paid.

Summary of Contents for Wafergard III NF-750

Page 1: ...WAFERGARD III NF 75O IN LINE GAS FILTERS Installation and use manual ...

Page 2: ...NSTALLATION AND USE MANUAL Table of Contents Introduction 2 Features and Benefits 2 Applications 2 Specifications 2 Installation 3 Step 1 Unpack the Filter 3 Step 2 Install the Filter 3 Step 3 Prepare the Filter for Use 3 Filter Replacement 3 Performance Data 4 Dimensions 4 Ordering Information 4 Warranty Information 5 ...

Page 3: ...ented sintered nickel membrane filter Housing Patent pending design electropolished VAR 316L stainless steel housing Downstream cleanliness Particles1 2 0 03 particles liter 1 particle ft3 0 01 µm 300 SLPM Volatiles3 Volatile outgassing of H2O O2 and THC is below detectable limits by RGA and FID at room temperature Removal rating 0 003 µm Surface finish interior 5 µin Ra Total flow area 140 0 cm2 ...

Page 4: ... filter on the mating connections 4 Tighten the nuts by hand then 1 8 turn past hand tight by wrench for VCR compatible fittings DO NOT overtighten NOTE Refer to specific technical guides furnished by fitting manufacturers for additional specifications Step 3 Prepare the Filter for Use 1 Verify integrity of the seal by appropriate helium leak testing procedures 2 Turn the gas flow ON then OFF 10 t...

Page 5: ...ate 23 C SLPM 0 200 400 600 800 1000 60 48 36 24 12 0 5 6 4 8 4 0 3 2 2 4 1 6 0 8 0 2 06 bar inlet 30 PSIG 6 2 bar inlet 90 PSIG 4 12 bar inlet 60 PSIG Differential Pressure bar Differential Pressure PSIG Nitrogen Flow Rate 23 C SLPM 0 200 400 600 800 1000 15 12 9 6 3 0 1 4 1 2 1 0 0 8 0 6 0 4 0 2 0 Part Number Overall Length Fitting Options WG3N S7 RR2 127 mm 5 00 1 4 Gasket seal compatible with ...

Page 6: ... the warranty period provided the customer notifies Entegris promptly of any such defect The exclusive remedy provided herein shall not be deemed to have failed of its essential purpose so long as Entegris is willing and able to repair or replace any nonconforming Entegris product or part or to refund the purchase price paid Applicable Warranty Period As used in this General Limited Warranty the t...

Page 7: ...S Patent No 36 249 2000 2007 Entegris Inc All rights reserved Printed in U S A P74590 Rev B 4502 5258ENT 1007 The materials integrity management company For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you Visit www entegris com and select Regional Customer Service Centers for the center nearest you Terms and Conditions of Sale All purc...

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