Installation and Use
Step 1: Unpack the Filter
The filter is double-bagged for cleanroom service and
should remain packaged until installation.
NOTE: Do not remove the filter from the protective
bag unless you are in a clean environment.
1. Remove the filter from the box and carry it into the
gray area.
2. Remove the outer protective bag and discard.
3. Carry the filter (sealed in the inner bag), into the
clean area.
Step 2: Install the Filter
1. Prepare the connection fitting in place on the gas
line. Any other fitting components, such as stainless
steel gaskets, should be blown clean with a filtered
gas before use.
2. Maintain a flow of at least 1 SLPM (0.05 SCFM) of
inert gas during installation to minimize tubing and
filter contamination from environmental moisture
and particles. The recommended purge gas is
electronic-grade nitrogen.
3. Open the inner bag and remove the filter. Remove
the fitting protection caps and seat the filter on
the mating connections.
4. Tighten the nuts by hand, then
1
⁄
8
turn past hand-
tight by wrench for VCR
®
-compatible fittings.
DO NOT overtighten
.
NOTE: Refer to specific technical guides furnished
by fitting manufacturers for additional specifications.
Step 3: Prepare the Filter for Use
1. Verify integrity of the seal by appropriate helium
leak-testing procedures.
2. Turn the gas flow
ON
, then
OFF
, 10 times to remove
any particles generated during installation. (The
flow rate used should at least equal the process
flow specifications.)
3. Installation is complete. Initiate startup procedures
for process gases.
Filter Replacement
1. Turn off the process gas.
CAUTION! Purge the system with inert gas for a
minimum of 4 hours at full gas flow when using
toxic, corrosive or pyrophoric gases.
2. Remove the existing filter from the gas line and
seal with fitting caps.
3. Install a replacement filter as outlined above.
CAUTION! Dispose of the used filter in compliance
with local regulations.
ENTEGRIS, INC.
WAFERGARD® III NF-750 IN-LINE GAS FILTERS MANUAL P74590 REV. B
3
WAFERGARD® III NF-750 IN-LINE GAS FILTERS INSTALLATION AND USE MANUAL
!
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