INVUE GV148 LIQUID CHEMICAL CONCENTRATION MONITOR
27
User Guide | Entegris, Inc.
C
NC
NO
Line Regulator
90 psig
N
2
In
V4 NC
N
2
/rinse
On/Off
V2 NC
DI water/purge
On/Off
LFC
PT
0 – 100 slm
N
2
flowmeter
DI water in
@ 40 psig
C
NO
NC
V1 NC
N
2
On/Off
V5 NC
DI water
On/Off
V7 NC
N
2
On/Off
V8 NC DI
On/Off
DI water in
@ 40 psig
V6 3-way valve
DI water-purge
select
V3 3-way valve
DI water-purge
select
Figure 4.
Figure 5 provides the structure for a basic in situ
window clean recipe that can be periodically initiated
to remove any slurry build up on the GV148 sapphire
window.
Cleaning
step
Step time
V1 V2 V3 V4 V5 V6 V7 V8
LFC set point
Step notes
Facility
Line
Rinse
120 sec.
X
X
X
X
250 cc/min
Rinses in situ rinse nozzle, DI water, and
N
2
ports of any slurry deposits prior to
atomized window clean
Atomized
Window
Clean
300 sec.*
X
X
X
X
X
250 cc/min
Removes slurry build up from RI monitor
sapphire window
Facility
Line
Purge
60 sec.
X
X
X
X
X
X
Purges and dries in situ rinse nozzle, DI
water, and N
2
facility lines, GV148 monitor
sapphire window
*Step time can be reduced or extended to accommodate slurry type and amount of incurred slurry deposits
Figure 5.
