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INVUE GV148 LIQUID CHEMICAL CONCENTRATION MONITOR
User Guide | Entegris, Inc.
Figures 6 – 8 provide highlighted P&ID’s for each
suggested in situ window recipe step provided in
Figure 5.
Figure 6. Facility line rinse. Highlighted P&ID.
Figure 7. Atomized window clean. Highlighted P&ID.
C
NC
NO
Line Regulator
90 psig
N
2
In
V4 NC
N
2
/rinse
On/Off
V2 NC
DI water/purge
On/Off
LFC
250 cc/min
Set point
PT
0 – 100 slm
N
2
flowmeter
DI water in
@ 40 psig
C
NO
NC
V1 NC
N
2
On/Off
V5 NC
DI water
On/Off
V7 NC
N
2
On/Off
V8 NC DI water
On/Off
DI water in
@ 40 psig
V6 3-way valve
DI water-purge
select
V3 3-way valve
DI water-purge
select
C
NC
NO
Line Regulator
90 psig
N
2
In
V4 NC
N
2
/rinse
On/Off
V2 NC
DI water/purge
On/Off
PT
0 – 100 slm
N
2
flowmeter
DI water in
@ 40 psig
C
NO
NC
V1 NC
N
2
On/Off
V5 NC
DI water
On/Off
V7 NC
N
2
On/Off
V8 NC DI water
On/Off
DI water in
@ 40 psig
V6 3-way valve
DI water-purge
select
V3 3-way valve
DI water-purge
select
LFC
250 cc/min
Set point
