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INVUE GV148 LIQUID CHEMICAL CONCENTRATION MONITOR
User Guide | Entegris, Inc.
INFO TAB
The
Information
page is mostly read-only information
that is assigned during manufacturing regarding PCBs,
sensors, firmware, monitor cycles, volumes, and
resettable cycles and volumes.
NOTE: The user should add monitor identification and
location descriptions like Customer Name, Fab Name,
Tool Name, etc. These identifying markers are used as
references on the Connect page and in saved profiles.
SELF TESTS TAB
The
Self Tests
page allows the user to perform self-
diagnostic tests to check the functionality of the
system or perform standard routines like re-zero.
Follow the instructions given in the
Test Description
for each test.
Refractive Index Re-zero from the HMI
The re-zero function calibrates the refractive index
measurement to a known baseline. The typical base-
line for DI water is [IoR = 1.332987].
CAUTION: Process lines that cannot use DI water
may use another reference chemical of a known
concentration or Index of Refraction.
CAUTION: The monitor and fluid lines must be
free of air bubbles.
CAUTION: In order to accomplish an accurate
Refractive Index Re-zero Self Test, a Primary or
Secondary Chemistry (TCC) value should be
defined via the Coefficients Generator located
on the
Temperature Compensation
tab.
1. Select the “Systems” tab.
a. Enable either “Primary Chemistry (TCC)”
or “Secondary Chemistry (TCC)” to select
a chemistry.
