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Intro-2 

Part replacement 

When replacing parts, be sure to use the genuine DISCO brand. If any parts 
other than DISCO's genuine parts are used, DISCO shall assume no liability 
for any damage of any kind. 

When replacing components using the UL-listed parts, be sure to use the UL-
listed parts to be installed. 

When replacing any critical parts, consult your nearest DISCO office. If any 
critical parts are replaced without consulting DISCO, DISCO shall assume no 
liability for any consequences arising therefrom. 

Part warranty period 

Part warranty period is as follows: 

Part 

Warranty period 

Electrical parts having contact points

Six months 

from the B/L date

 

Consumable parts 

Not covered 

Parts other than the above 

12 months 

from the B/L date

 

Documentation for this machine 

The following five written manuals are provided for this machine.  
This manual is the Maintenance Manual indicated by the arrow. 

Manual 

Who should read

Contents 

Installation Manual

Maintenance 

personnel 

Operational procedures for 
machine installation and 
adjustment 

Operation Manual

Operator 

Operational procedures to be 
performed by operators 

Data Maintenance

Manual 

Data maintenance 

personnel 

Screen contents for data entry and 
data entry procedures 

Maintenance 

Manual 

Maintenance 

personnel 

Servicing, inspection and 
adjustment procedures to be 
performed by customers 

Technical 

Reference 

Maintenance 

personnel 

Machine specifications, 
circuit diagrams, illustrations and 
part lists 

Unit notation 

International System of Unit is adopted to express any unit. The values in the 
parenthesis are reference data. Also, all the pressure values are expressed in 
gauge pressure. 

 

Sample

Summary of Contents for DAD321

Page 1: ...oduced in any form or by any means without the express written permission of Disco Also this document may not be disclosed or transferred to third parties This document is printed on recyclable Lint F...

Page 2: ...To assure safety in the operation and maintenance of the machine it is important that you know the location of potential safety hazards It is difficult for DISCO to foresee each and every potential sa...

Page 3: ...critical situation in which either critical injury or death is very likely to result This symbol is used for the incident in which the injury is critical and there is high probability of occurrence WA...

Page 4: ...lade Observe the following precautions for at least 15 seconds until the spindle comes to a complete stop Do not place your hands or fingers near the blade or flange Ensure that the splash cover is ke...

Page 5: ...be done by a qualified person who has completed DISCO s education curriculum hereinafter referred to as the maintenance personnel Definition of a manager and an operator This manual defines a manager...

Page 6: ...the B L date Documentation for this machine The following five written manuals are provided for this machine This manual is the Maintenance Manual indicated by the arrow Manual Who should read Content...

Page 7: ...Intro 3 Notation of part number In this document the part numbers are shown as follows New style part no Former style part no XXXX XXXXXX X YYYYYYYY Y S a m p l e...

Page 8: ...Cutting section Name Function Cutting Section Cuts workpieces Operation Control Section Keys on the operation panel are used for data entries and the function keys perform operations Also the monitor...

Page 9: ...ndicates the flow rate of the wheel coolant water Disk Drive Functions as an external storage device Optional accessory Pilot lamp Indicates the machine operating status with the green and yellow lamp...

Page 10: ...axis Z axis Y axis Main body frame Front Name Function X axis Moves the chuck table to the right and the left Y axis Moves the spindle axis and the microscope forward and backward Z axis Moves the sp...

Page 11: ...ardous Areas and Ways to Avoid Hazards A 10 3 1 Inherently Hazardous Areas for Operation and Ways to Avoid Hazards A 11 3 2 Inherently Hazardous Areas for Maintenance and Ways to Avoid Hazards A 13 4...

Page 12: ...of the splash cover C 27 4 2 Machine Protection C 28 4 2 1 Air pressure sensor C 29 4 2 2 Flow rate sensor Optional accessory C 30 D ADJUSTMENT OPERATION D 1 1 Chuck Table Replacement D 2 1 1 Chuck Ta...

Page 13: ...ng E 6 2 1 1 Flange conditioning E 7 2 1 2 Wheel mount conditioning E 8 2 2 Executing Conditioning E 9 2 2 1 Replacing the chuck table E 11 2 2 2 Verifying CONDITIONING screen data E 12 2 2 3 Executin...

Page 14: ...e Whose Interval Differs Depending on the Use Conditions of the Device G 3 1 1 Cleaning the Non contact Setup Sensor Detection Surface Optional Accessory G 4 1 1 1 Calling up the NON CONTACT SENSOR CL...

Page 15: ...4 1 Conditioning the Flange G 42 5 Maintenance to Be Performed at 90 Day Recommended Intervals G 43 5 1 Cleaning the Electrical box Filter in case this machine is used outside the cleanroom G 44 6 Mai...

Page 16: ...Filters for Air H 3 1 2 Replacing the Halogen Lamp H 6 1 3 Replacing the Spindle Carbon Brush H 9 1 4 Replacing the Waterproof Sponge H 12 1 5 Replacing the Spindle Waterproof Plate Ring H 14 1 5 1 Re...

Page 17: ...uck Table Waterproof Cover Chuck Table O ring Bellows H 39 3 1 1 Removing the chuck table H 40 3 1 2 Replacing the waterproof cover O ring bellows H 41 3 1 3 Completion of replacing the waterproof cov...

Page 18: ...before operation Safety precautions that operators should observe during performing any work 3 Inherently Hazardous Areas and Ways to Avoid Hazards Potentially hazardous sections and the ways to avoi...

Page 19: ...forth in the Maintenance Manual before proceeding to work Also if the operator performs various tasks direct them to read the points of note concerning the safety given in the respective manuals The w...

Page 20: ...low connection port Rc PT 1 8 female View A Duct A Sampling port Rc PT 1 8 female Facility side interlock connection terminal Special user specification To permit the facility side to provide air exha...

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